Advanced Motion Systems

For over 60 years, our MKS Newport™ motion team has been developing and manufacturing high precision systems enabling some of the most important advancements in the semiconductor industry. We offer custom modular platforms with low-profile XY and integrated Z/ZTT. Depending on requirements our systems can be built as mechanical, hybrid or full air bearing XY systems. All of our systems offer precision motion control for process synchronization and stability along with a high level of system integration with guaranteed point of interest performance.