Piezo Motor Linear Stages
These exceptional precision linear translation stages feature piezo actuators with a step size <30 nm for very small controlled movements. Piezo actuators feature set-and-forget stability with virtually no backlash by design. We also offer a full range of easy-to-use, flexible piezo motion controllers and drivers to complete your nanopositioning system.
Agilis™ Miniature Piezo Linear Stages
- Up to 48 mm strokes, open and closed loops
- Up to 10 mm/s speed
- Down to 25 nm MIM
Picomotor™ Actuated Linear Stages
- Extremely high position stability
- 30 nm MIM
- Available for vacuum and UV environments
Piezo Flexure Linear Stages
- High dynamic capabilities
- Sub-nm resolution
- Open and closed loops, vacuum versions available
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