Ultraviolet Optics Selection Guide
Selecting the proper optic for an ultraviolet application is very important to the success of your set up. Because of the shorter wavelengths, any pits, flaws or coating impurities on the optical surface may form a concentration of optical power creating a hot spot on the optic. Depending on your application and how far you are into the Ultraviolet wavelengths, quality, cleanliness, and special packaging requirements are key considerations.
Proper manufacturing techniques and keen attention to cleanliness are required to make the best UV optics possible. If improper grinding or polishing techniques are used, there is a potential for the substrate to have higher microroughness and possible micro-fractures. The visual inspection of the substrate surfaces may look good, but when UV coatings are applied, a typical outcome is grazing or micro-fractures in the coating. Typically the blame is put on the quality of the coating but in actuality, substrate preparation is critical for good coating adherence. We, at Newport, have extensive experience in the proper manufacturing, cleanliness, coating technology, packaging and proper handling of UV optics. Look to us for solutions to your UV optics needs.
Ultraviolet Wavelength Categories
Depending on your operating wavelength, the photonics industry will classify that wavelength range into the following:
| Wavelength Range | Category | Acronym |
|---|---|---|
| 10 - 124 nm | Extreme UV | EUV |
| 193 nm | Deep UV | DUV |
| 100-190 nm | Vacuum UV | VUV |
| 193 -395 nm | Ultra-Violet | UV |
| DUV Wavelengths | Category |
|---|---|
| 248 nm | KrF Excimer |
| 193 nm | ArF Excimer |
Newport Ultraviolet Optic Products Showcase
| Series | Typical Performance | Diameter (mm) | Surface | Notes | |
|---|---|---|---|---|---|
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UV Beam Viewer | Glows white green when exposed to UV light | 66.0 | Commercial Polish, Flat | Cleanroom Compatible |
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UV Broadband Beam Samplers | Uncoated Front Surface Fresnel Reflector | 25.4 & 50.8 | Flatness of λ/10 | Back Side AR Coating 255-440nm |
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UV Bandpass Filters | Center Wavelengths from 206 to 400 nm | 25.4 | Flat | Superior lifetime in harsh environmental conditions |
Ultraviolet Mirrors, Beamsplitters, Waveplates and Polarizers
| Series | Performance | Diameter/Size (mm) | Shape | Key Feature | |
|---|---|---|---|---|---|
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High-Energy Excimer Laser Mirrors | High Damage Threshold | 25.4, 38.1, 50.8 | Round Flat | R>99% at 45°, 248, 308, 355 nm |
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UV Plate Beamsplitters | Various beamsplitter ratios | 25.4, 50.8 | Square or Round Flat | 250-450 nm |
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Laser Line Polarizing Cube Beamsplitters | Tp/Ts > 100:1, Tp >90%, Rs >99% | 12.7, 25.4 | Cube | 248, 266, 308, 355 nm |
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UV Non-Polarizing Cube Beamsplitters | 50 ±3%, independent of polarization | 25.4 | Cube | 355 nm |
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High-Energy Nd:YAG Laser 50/50 Beamsplitters | High Damage Threshold | 25.4, 50.8 | Round Flat | 266, 355 nm |








