OLED (Organic Light Emitting Diode) Manufacturing

Energy efficient OLED panels are thin and flexible while offering superior image quality with faster response times than standard LED or LCD displays. These advantages make OLED panels of all shapes and sizes ideal for TVs, digital signage, automobile interiors, wearable devices, foldable or flexible phones, AR/VR systems and many other aspects of the digital transformation of society.

MKS Solutions for OLED Panel Manufacturing

Challenges in OLED Manufacturing	MKS Solutions
Maximizing throughput & yield	Pulsed lasers for high speed, yield and precision micromachining Fast laser measurement and profiling High power/high fluence optics to manage the lasers High speed and precision motorized positioners
Improving OLED quality and reliability	Ultrafast and Nanosecond lasers for highest quality micromachining Robust, stable optical mounts
Machining complex shapes & material systems	Ultrafast lasers to selectively process complex material systems High precision motorized positioners
Reducing cost of ownership of production line	Lasers to increase uptime of production line and reduce service cost

Your Partner for OLED Panel Processing

50+ years and thousands of alignment systems for optical applications
Long-term partner to flat panel processing companies
Full range of products: lasers, optics, motion, opto-mechanics, beam analysis
- Custom capabilities
- Product availability
Ability to scale with you
Global corporation and presence

Lasers	Beam Analysis	Motion Control	Optics & Opto-Mechanics
Ultrafast (femtosecond and picosecond) and nanosecond lasers DPSS Q-switched lasers UV, green and IR lasers	Laser thermal sensors Beam profilers Laser power/energy meters	Air-bearing, linear motor platforms Motion controllers Full range of motorized & manual positioners	Mirror mounts Lens positioners High-energy optics UV, visible and IR optics

Lasers

Criteria for Selecting Lasers

When choosing a laser, there are three main categories of criteria to consider. First is the application or function of the laser, such as cutting or drilling. The next category addresses the requirements of that application, such as the type and thickness of the material to be processed. Then, the specifications of lasers, such as wavelength and power, must be evaluated. Listed here are the criteria that MKS believes are most important when selecting lasers for OLED panel processing.

Application or Function
- Glass and film cutting
- Fine metal mask drilling
- Silicon scribing/dicing (µ-OLED)
- Laser-Lift-Off
- Repair
Application Requirements
- Type of Material
- Thickness of Material
- Speed
- Resulting Size of Heat Affected Zone (HAZ)
Laser Specifications
- Wavelength
- Power
- Pulse Width and Repetition Rate
- Stability

Femtosecond Lasers

IceFyre^® FS Femtosecond Lasers: Breakthrough high-power UV femtosecond lasers for 24/7 micromachining of critical OLED materials
Spirit^® Femtosecond Lasers: High average power, high pulse energy and high repetition rates for increased throughput

	IceFyre^® FS
Wavelengths	UV	IR
Power	>50 W @ 1 MHz and 1.25 MHz	>200 W @ 1-50 MHz
Pulse Width	<500 fs
Repetition Rates	Single Shot to 3 MHz	Single Shot to 50 MHz
Max Pulse Energy	>50 µJ @ 1 MHz	>200 µJ @ 1 MHz
Other Features	24/7 industrial reliability TimeShift™ technology for pulse control Laser/controller in single, compact package

	Spirit^®
Wavelengths	Green	IR
Power	>15 W	>30 W
Pulse Width	<400 fs or <500 fs
Repetition Rates	Single Shot to 1 MHz
Max Pulse Energy	>60 µJ	>120 µJ
Power Stability	<1% rms over 100 hrs
Other Features	User-configurable burst mode

Picosecond Lasers

IceFyre^® Picosecond Lasers: Versatile UV, green and IR picosecond lasers: The new standard for picosecond micromachining.

	IceFyre®
Wavelengths	UV	Green	IR
Power	Up to >50 W
Pulse Width	<12 ps	<15 ps
Repetition Rates	Single Shot to 10 MHz
Max Pulse Energy	Up to >60 µJ	Up to >100 µJ	Up to >200 µJ
Other Features	24/7 industrial reliability TimeShift™ technology for pulse control Laser/controller in single, compact package

Nanosecond Lasers

Talon^® Ace™ Laser: highest single-mode ns UV power in the industry, with TimeShift programmable pulse capability
Talon^® Nanosecond Lasers: superior combination of performance, reliability and cost.
Quasar^® High-Power Nanosecond Lasers: highest power UV and green hybrid fiber lasers, with programmable pulses, for highest throughput and quality in the industry.

	Talon Ace	Talon	Quasar
Wavelengths	UV	UV or Green	UV or Green
Power	>100 W	UV: Up to >45 W Green: Up to >70 W	UV: Up to >80 W Green: Up to >95 W
Pulse Width	<2 to >50 ns	UV: <25 or 40 ns Green: <25 or 43 ns	<2 to >100 ns
Repetition Rates	Single shot to 5 MHz	0 to 500 kHz	0 to 3.5 MHz
Max Pulse Energy	Up to >500 µJ	UV: Up to >500 µJ Green: Up to 1000 µJ	UV: Up to >400 µJ Green: Up to >475 µJ
Other Features	24/7 industrial reliability TimeShift technology for pulse control Laser/controller in single, compact package	Laser/controller in single, compact package 24/7 industrial reliability E-Pulse™ technology for superb stability	24/7 industrial reliability TimeShift™ technology for pulse control

Lasers for OLED Panel Processing Selection Guide

Presented here is a summary of recommended MKS lasers for various OLED manufacturing applications. Please use this as a reference guide only, and always contact us to discuss your application and requirements in detail so that we may provide the best solution for you.

	IceFyre^® FS		IceFyre^®			Talon^® Ace™	Talon^®		Quasar^®		Spirit^®
	UV (fs)	IR (fs)	UV (ps)	Green (ps)	IR (ps)	UV (ns)	UV (ns)	Green (ns)	UV (ns)	Green (ns)	Green (fs)	IR (fs)
Cutting Film	✓		✓	✓							✓	✓
Cutting Glass		✓			✓
Repair	✓										✓	✓
Fine Metal Mask (FMM) Drilling	✓
Laser-Lift-Off (LLO)			✓			✓	✓
Scribing/Dicing* Silicon Die (µ-OLED)			✓	✓		✓	✓	✓	✓	✓

* Dicing thin wafers < 100 µm

Laser Beam Analysis

Even with the advantages that lasers provide over traditional tools, lasers systems can degrade over time, leading to reduced output power or a change in focus. This, in turn, could result in lower quality laser operations. Therefore, it is very important to monitor your laser beam frequently, and the critical parameters of the laser should be checked before and after each important step of the laser manufacturing process.

Laser Power Sensors

MKS offers a comprehensive portfolio of power sensors. Shown here are examples of sensors designed to measure optical output power of short-pulsed lasers, such as IceFyre, Spirit, Talon and Quasar that operate in fs, ps and ns pulse widths.

Laser Thermal Power Thermal Sensors: very high damage thresholds for hundreds of watts power measurement.

	F150(200)A-CM-16	30(150)A-SV-17	F80(120)A-CM-17
Spectral Range	0.248-9.4 µm	0.19-11 µm	0.248-9.4 µm
Power Range	300 mW - 200 W	100 mW - 150 W	100 mW - 120 W
Energy Range	50 mJ – 200 J	50 mJ – 300 J	50 mJ – 200 J
Max Avg Power Density	35 kW/cm²	60 kW/cm²	35 kW/cm²
Max Energy Density (2 msec)	45 J/cm²	50 J/cm²	45 J/cm²
Aperture	Ø16 mm	Ø17 mm	Ø17.5 mm
Response Time	3 sec	1.7 sec	2 sec
Other Features	Not water-cooled

The recommended products above are the most popular models for OLED panel processing. We have a lot more than these and you can use our online tools to find the ones that best fit your requirements.

Sensor Finder and Laser Fluence Calculator

Power Meters

Ophir laser power and energy meters work on the smart plug principle. This means that almost any power meter can work – plug and play – with almost any of the wide range of Ophir optical sensors.

Power Meters		Virtual Power Meters
Centauri	StarBright Handheld	Juno+	EA-1
Extensive graphic displays on 7-in full color touchscreen display Advanced measurement processing Single- or dual-channel versions USB and RS-232 interfaces, with user-friendly software application Analog and TTL output External trigger input	Portable use For transmission checks "in the field" Variety of measurement modes and displays USB & RS-232 interfaces	USB connection to use PC as monitor User-friendly software Extensive graphic displays of data Advanced measurement processing Data logging	Ethernet adapter enables remote control and monitoring of sensor Telnet, HTTP and UDP protocols supported Interact with sensor through custom software or MKS user-friendly software Data logging

Beam Profilers

SP932U Beam Profiling Camera: high resolution, real-time viewing and measuring of laser structure with highest accuracy in the industry.

	SP932U
Spectral Range	190-1100 nm
Damage Threshold	50 W/cm², 1 J/cm², <100 ns pulse width
Beam Sizes	34.5 µm to 5.3 mm
Pixels	2048 x 1536 Effective Pixels, 3.45 µm Pixel Size
PC Interface	USB 2.0
Other Features	BeamGage^® software included UltraCal™ correction algorithm Measures cross-sectional intensity 72 dB true dynamic resolution 24 Hz frame rate in 12-bit mode

Motion Control

Guaranteed Motion Control Performance

Stages that MKS ships meet or exceed the guaranteed specifications
Metrology reports included with each stage (ASME B5.57 and ISO 230-2 standards)
Typically, the product will perform ~2x better than the guarantee

HybrYX^® G5 Air & Mechanical Bearings Positioning System

The HybrYX^® G5 combines the precision of air bearings with the cost-effectiveness of mechanical bearings for large payloads.

	X-Axis	Y-Axis
Travel Range	450 mm	1400 mm
Speed	300 mm/s	600 mm/s
Peak Acceleration	0.15 G	0.25 G
Load Capacity	40 kg
Accuracy	±3 µm
Y-axis Straightness	1 µm
XY Flatness	0.6 µm (300 mm circle)
Speed Stability	0.1%
Other Features	Z-Tip-Tilt-θ option

IDL-LM Series Industrial Linear Motor Stages

Highest load capacity and speed of all linear motor stages for demanding production environments

	IDL-LM Series
Travel Range	100 to 1200 mm
Speed	2000 mm/s
Load Capacity	450 to 2,000 N
Accuracy	±2 to ±5 µm
Repeatability	±0.25 to ±0.5 µm
Pitch	±15 to ±65 µrad
Yaw	±15 to ±40 µrad
Other Features	Ironless Linear Motor Recirculating ball bearings Industrial grade hard covers

IMS Series Long-Travel Aluminum Linear Positioners

High load capacity, long travel, fast movement capable of high-duty cycles in industrial applications

	Stepper Motor	DC Motor
Travel Range	300 to 600 mm
Speed	100 m/sec	200 mm/sec
Load Capacity	600 N
Pitch	±37 to ±50 µrad
Yaw	±15 to ±30 µrad
Accuracy	±2.5 to ±4 µm
Other Features	Double-row recirculating ball bearings Linear motor version available

ILS Series Mid-Travel Aluminum Linear Positioners

High load capacity, mid-travel, fast movement capable of high-duty cycles in light industrial applications

	Stepper Motor	DC Motor
Travel Range	50 to 250 mm
Speed	50 m/sec	100 mm/sec
Load Capacity	250 N
Pitch	±15 to ±42 µrad
Yaw	±12 to ±25 µrad
Accuracy	±0.6 to ±1.7 µm
Other Features	Double-row recirculating ball bearings Linear motor version available

Motion Controllers

XPS-D	XPS-RLD
High performance, complex motion trajectories Up to 8 axes Extensive analog and digital I/O Can synchronize galvos and positioners Best for the most demanding applications	High performance, complex motion trajectories Up to 4 axes Analog and digital I/O Can synchronize galvos and positioners Good for demanding R&D and low volume production

Optics

Criteria for Selecting Optics

Wavelength
Laser Damage Threshold
- Substrate Material
- Coating
Reflectivity/Transmission
Size and Shape

High-Energy Laser Mirrors

High-energy laser mirrors optimized for 355, 532 and 1064 nm offer very high reflectivity and damage thresholds, and standard broadband metallic mirrors offer a more economic option for good performance and value over very broad spectral ranges.

	High-Energy Laser Mirrors
Wavelength	355 nm	532 nm	1064 nm
CW Damage Threshold	3 kW/cm²
Pulsed Damage Threshold	3.5 J/cm² @ 10 ns, 20 Hz	10 J/cm² @ 20 ns, 20 Hz	45 J/cm² @ 10 ns, 20 Hz
Reflectivity	R_s > 99.7% R_p > 99%
Diameter	1 and 2 inch
Substrate Material	UV Grade Fused Silica
Angle of Incidence	45°

High-Energy Plano-Convex Lenses

High-energy lenses optimized for 355, 532 and 1064 nm offer very high transmission and damage thresholds, and standard fused silica lenses offer good performance and value over very broad spectral ranges.

	High-Energy Spherical Lenses
Wavelength	355 nm	532 nm	1064 nm
Pulsed Damage Threshold	15 J/cm² @ 20 ns, 10 Hz
Average Reflectivity per Surface	< 0.25%
Diameter	1 inch
Substrate Material	High Purity Fused Silica

Nanotexture Surface Lenses

Highest laser damage resistance and lowest reflection loss

	Nanostructure Surface Fused Silica Plano-Convex Lenses
Wavelength	250 to 550 nm or 500 to 1100 nm
CW Damage Threshold	15 MW/cm²
Pulsed Damage Threshold	35 J/cm2 @ 10 ns, 1064 nm
Reflection Loss	0.1%
Diameter	0.5 in.
Shapes	Plano-Convex or Plano-Concave
Substrate Material	High Purity Fused Silica
Other Features	Sub-λ AR nanotextures etched directly into surface (no thin film coatings)

High-Energy Polarizing Cube Beamsplitters

Optimized for 355, 532 and 1064 nm, these cubes offer high damage thresholds, efficient polarization, and high extinction ratio.

	High-Energy UV Polarizing Cube Beamsplitters	Laser Line Polarizing Cube Beamsplitters
Wavelength	355 nm	532 nm	1064 nm
Pulsed Damage Threshold	5 J/cm²	10 J/cm²
Reflectivity	R_s > 99%	R_s > 99.5%
Transmission	T_p > 90%	T_p > 95%
Extinction Ratio	T_p/T_s >200:1
Size	1 in.	0.5 in.
Substrate Material	UV Grade Fused Silica
Other Features	Optically contacted, no cement

Zero-Order Waveplates (λ/4 and λ/2)

Very high damage threshold, low sensitivity to temperature and wavelength variation.

	Zero-Order Waveplates
Wavelength	355 nm	532 nm	1064 nm
CW Damage Threshold	2 MW/cm²
Reflectivity per Surface	< 0.25%
Diameter	0.5 and 1 in.
Substrate Material	Quartz
Temperature Coefficient	0.0001 λ/°C
Other Features	±λ/300 retardation accuracy

Opto-Mechanics

Criteria for Selecting Optical Mounts

Resolution/Sensitivity
Long Term Stability
Lockable
Size and Shape

Optical component mounts are needed to hold and adjust optics. Long term stability and low drift is crucial. Minimizing drift caused by vibrations or thermal drift over time will ensure laser alignment to the desired spot and also reduce any potential downtime due to misalignment and errors. Having a locking mechanism on these mounts can also prevent misalignment of the beam, especially during shipping and also if anything else happens during usage.

HVM industrial mounts are recommended for robust long term usage in compact space. The Suprema^® mirror mount is excellent for its stainless steel construction that gives better thermal performance than an aluminum mirror mount. Ultra-fine 254-TPI adjusters provide alignment sensitivity as low as 1.5 arc sec. For applications that are really concerned about the thermal changes that can be potentially caused by prolonged high powered laser usage, the ZeroDrift™ version will compensate for some thermal changes as well. For those mirror mounts that need to be set-and-forget for a long period of time, we recommend the MFM flexure mirror Mount. These are excellent for their small footprint so that machine size can be reduced.

Suprema® Stainless Steel Mirror Mounts: the industry's best thermal performance for long-term stability.
M-Series Aluminum Mirror Mounts: the new standard for affordable mounts.

	Suprema	M-Series
Optic Diameters	0.5, 1 and 2 in.	0.5, 1 and 2 in.
Resolution	50, 100, 127 and 254 TPI	100 TPI
Angular Range	±7°	±4°
Material	Stainless Steel	Aluminum
Drive Types	Knob Hex Key Exchangeable Actuators	Knob Hex Key
Lockable Versions	Yes	No
Other Versions	Clear-Edge Front- and Rear-Loading Right- and Left-Handed Low Wavefront Distortion ZeroDrift™	Clear-Edge Front- and Rear-Loading Right- and Left-Handed

HVM Top-Adjust Mirror Mounts: for use in compact spaces so your hands do not have to cross the beam path for adjustment.
MFM Flexure Mirror Mounts: designed for "set and forget" applications.

	HVM-Series	MFM-Series
Optic Diameters	0.5, 1 and 2 in.	0.5, 0.75 and 1 in.
Resolution	80 and 100 TPI	80 and 100 TPI
Angular Range	±2.5°, ±3° and ±3.5°	±2.5°
Material	Anodized Aluminum, Stainless Steel	Stainless Steel
Drive Types	Hex Key	Hex Key
Lockable Versions	Yes	No
Other Features	Front- and Rear-Loading Versions	Shock Resistant Front- and Rear-Loading Versions Adhesive wells for permanent mounting

A-Line™ Fixed Position Lens Mounts: fast, easy and economic mounting, aligning and focusing of optics.
Compact Lens Positioners: ideal solution for applications with limited table space.
LP Precision Multi-Axis Lens Positioners: highest performing lens positioners.

	A-Line	Compact	LP-Series
Optic Diameters	0.5 to 3 in.	0.5, 1 and 2 in.	0.5, 1 and 2 in.
Resolution	-	100 TPI	100 TPI
Adjustments	Fixed	XY, XYZ, XYZθxθy	XY, XYZ, XYZθxθy
Material	Aluminum	Aluminum	Aluminum
Other Features	Self-aligning design Large clear aperture Compatible with A-Line alignment system	Adapters for other optics Lockable positions	Zero-freeplay XY mechanism True Gimbal adjustments Independent non-influencing locks Adapters for other optics

Ultima® Gimbaled Cube/Prism Mount: precision alignment of beamsplitter cubes and prisms.
RSP High Performance Optic Rotation Mounts: smooth, continuous 360° rotation of optics.

	UGP-1	RSP-Series
Optic Size	0.5 and 1 in. cube	1 and 2 in.
Resolution	100 TPI	4 arc min
Angular Range	±5°	360°
Material	Aluminum	Aluminum
Drive Types	Knob w/ Hex Hole	Coarse: knurled edge Fine: knob
Lockable	Yes	Yes
Other Features	True gimbal motion Adapters for other optics	Full ball bearing races Adapters for other optics

PX Forkless Optical Pedestals: Long-term stability of a pedestal at 1/3 the space.

	PX Post	PX Pedestal
Diameter	1 in.	1 in. with 1.25 in. flange
Heights	1, 2, 3 and 4 in.
Material	Stainless Steel
Other Features	Accessories for varying heights and mounting configurations

Vibration Control

For applications that require holding alignments in place, we offer a comprehensive range of vibration isolation and damping solutions to ensure a stable system.

	Breadboards	Workstations	Table Systems	Tables and Legs
Dimension	Few feet	Few feet	Several feet, custom sizes	Several feet, custom sizes
Thickness	Few inches	Few inches	Several inches, custom thickness	Several inches, custom thickness
Portability	Must be carried or placed on "cart"	Casters on legs are standard	Larger, heavier, optional casters	Larger, heavier, optional casters
Isolation	None	✓	✓	✓
Damping	✓	✓	✓	✓
Setup	Base model comes assembled	Base model comes assembled	Support frame included but not assembled May need help from riggers	Tables, legs sold separately May need help from riggers

Resources

OLED Panel Processing Brochure(6.4 MB, PDF)