Vat Polymerization Additive Manufacturing
Additive manufacturing has often been used for complex, low volume parts. But adoption is increasing with the ability to produce more complex parts by designing products specifically for additive manufacturing and improving the technology and process. Costs are also being reduced through higher quality, reliability and stability of the process as well as faster production speeds. In vat polymerization systems—including stereolithography (SLA) and digital light processing (DLP)—a UV laser constructs an object in a vat of a liquid photopolymer resin by curing microfine layers of the resin.

MKS Solutions for Vat Polymerization Additive Manufacturing
| Challenges in Vat Polymerization | MKS Solutions |
|---|---|
| Maximize Speed / Reduce Process Time | High repetition rate UV lasers with fast rise times |
| Deliver high-resolution finished parts | UV lasers with high beam quality (M2 factor) Optics for manipulation of UV light High precision opto-mechanics and motion control |
| Reduce cost | Beam profilers and sensors to ensure beam quality Q-switched lasers |
Your Partner for Additive Manufacturing
- 50+ years and thousands of alignment systems for optical applications
- Long-term partner to additive manufacturing companies
- Full range of products: lasers, optics, opto-mechanics, beam profilers, sensors, positioners
- Proven performance
- Product availability
- Ability to scale with you
- Global corporation and presence
![]() Lasers |
Optics |
Opto-Mechanics |
Beam Analysis |
|---|---|---|---|
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Lasers
Criteria for Selecting Lasers
- Wavelength (primarily UV)
- Power (up to a few Watts)
- Repetition Rate (tens to hundreds of kHz)
- Beam Quality (M2 as close to 1)
- Rise Time
- Long Term Stability
Explorer® One™ Compact Nanosecond Lasers
Explorer One is ideal for vat polymerization. It is the most compact UV nanosecond laser in its class and features output powers up to a few Watts and nanosecond pulse widths. Combined with typical rise times of about 90% maximum power within 1 to 2 pulses, very fast scans are achievable in a vat polymerization system. High resolution scans are ensured with the laser's excellent beam quality and power stability.

| Explorer One | Explorer One XP | Explorer One HP | |
|---|---|---|---|
| Wavelength | UV | ||
| Power | 800 mW | 2 W | >4 or >6 W |
| Pulse Width | <10 ns | <12 or <15 ns | |
| Repetition Rates | Single shot to 200 kHz | Single shot to 500 kHz | Single shot to 200 or 500kHz |
| M2 | <1.3, TEM00 | ||
| Stability | <2% | ||
| Other Features | Very compact, lightweight air-cooled designs Fast rise times Thousands of hours in the field |
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HighQ-2™ Ultracompact Air-Cooled Femtosecond Lasers
HighQ-2 is ideal for two-photon polymerization (2PP), a technique based on the same principle of stereolithography (SLA), which can fabricate 3D microstructures suspended inside the liquid or gel without the need for a support structure. But unlike traditional SLA, which utilizes UV ns lasers, 2PP requires ultrashort pulse lasers, typically with visible to NIR wavelengths. HighQ-2 is an ultracompact, fs laser that delivers exceptional results for 2PP. Its high peak power, highly focusable Gaussian spatial beam profile and very high stability enable micron- and sub-micron-scale precision..
![]() HighQ-2™ |
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|---|---|---|
| Wavelength | IR | Green |
| Peak Power | >80 kW | >35 kW |
| Average Power | >1.5 W | >0.65 W |
| Pulse Width | <250 fs | |
| Repetition Rates | 63 MHz | |
| M2 | <1.15, TEM00 | |
| Power Stability | <1% rms (100 hours) <0.5% rms (12 hours) |
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| Other Features | Ultra-compact Air-cooled High uptime Low cost of ownership |
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Optics
For the vat polymerization lasers required, you will likely be operating around 355 nm UV. There are broadband and laser line optics available, but since you’ll know specifically which wavelength you’ll have, we recommend using laser line optics when possible because they’re optimized for a specific wavelength and will perform better than a broadband optic.

Criteria for Selecting Optics
- Wavelength (primarily UV)
- Laser Damage Threshold
- Substrate Material
- Coating
- Reflectivity/Transmission
- Size and Shape
Complex Optics & Optical Assemblies
MKS has a very experienced team of lens designers, opto-mechanical engineers and physicists that specialize in optical design and development. We are more than just a supplier of optical components – MKS can be your partner to deliver optical solutions for your needs. We can provide high precision optical assemblies, for example, lens assemblies. We can also build complete integrated solutions of optics, opto-mechanics and electronics, such as a system to shape beams and quickly change focus and spot size.

We specialize in the design of thin film coatings for laser optics whether it be reflective, anti-reflective, partially reflective, high power and other types. Vat polymerization typically uses UV wavelengths, such as 355 nm, but we also have much experience with coatings down to 193 nanometers. In addition to providing traditional optical shapes and coatings, MKS can also produce complex optical shapes, such as freeform optics, highly convex or concave optics, truncated optics and lightweight optics. We also have the capability of placing multiple coating types on a single optical component.
MKS will design a custom solution to meet your application's requirements, and we can handle build-to-print or build-to-specs. With our world class manufacturing capabilities, we are able to scale quantities as needed and also provide cost-effective high volume production.
High-Energy Laser Mirrors
High-energy laser mirrors optimized for 355-nm offer very high reflectivity and damage thresholds, and standard broadband metallic mirrors offer a more economic option for good performance and value over very broad spectral ranges.
| High-Energy Laser Mirrors | Broadband Metallic Mirrors | |
|---|---|---|
| Wavelength | 355 nm | 250-600 nm |
| CW Damage Threshold | 3 kW/cm2 | 100 W/cm2 |
| Pulsed Damage Threshold | 3.5 J/cm2 @ 10 ns, 20 Hz | |
| Reflectivity | Rs > 99.7% Rp > 99% |
>90% |
| Diameter | 1 and 2 in. | 0.5 to 8 in. |
| Substrate Material | UV Grade Fused Silica | Borofloat 33, Zerodur |
| Angle of Incidence | 45° | Insensitive to polarization and AOI |
High-Energy Plano-Convex Lenses
High-energy lenses optimized for 355-nm offer very high transmission and damage thresholds, and standard fused silica lenses offer good performance and value over very broad spectral ranges.
| High-Energy Spherical Lenses | Fused Silica Spherical Lenses | |
|---|---|---|
| Wavelength | 355 nm | 255-440 nm |
| Pulsed Damage Threshold | 5 J/cm2 @ 20 ns, 10 Hz | 2 J/cm2 @ 10 ns, 10 Hz |
| Average Reflectivity per Surface | < 0.25% | Ravg< 0.5% |
| Diameter | 1 in. | 0.25 to 2 in. |
| Substrate Material | High Purity Fused Silica | UV Fused Silica |
UV High-Energy Polarizing Cube Beamsplitters
Optimized for 355-nm, these cubes offer high damage thresholds, efficient polarization, and high extinction ratio.
| High-Energy UV Polarizing Cube Beamsplitters | Laser Line Polarizing Cube Beamsplitters | |
|---|---|---|
| Wavelength | 355 nm | 351-355 nm |
| Pulsed Damage Threshold | 5 J/cm2 @ 10 ns (266 nm) | 3 J/cm2 @ 10 ns, 10 Hz (266 nm) |
| Reflectivity | Rs > 99% | |
| Transmission | Tp > 90% | |
| Extinction Ratio | Tp/Ts >200:1 | Tp/Ts >100:1 |
| Size | 1 in. | 0.5 to 1 in. |
| Substrate Material | UV Grade Fused Silica | |
Zero-Order Waveplates (λ/4 and λ/2)
Very high damage threshold, low sensitivity to temperature and UV wavelength variation.
| 355 nm Zero-Order Waveplates | |
|---|---|
| Wavelength | 355 nm |
| CW Damage Threshold | 2 MW/cm2 |
| Reflectivity per Surface | < 0.25% |
| Diameter | 1 in. |
| Substrate Material | Quartz |
| Temperature Coefficient | 0.0001 λ/°C |
| Other Features | ±λ/300 retardation accuracy |
Opto-Mechanics
Criteria for Selecting Optical Mounts

- Resolution/Sensitivity
- Long Term Stability
- Lockable
- Size and Shape
Optical component mounts are needed to hold and adjust optics. Long term stability and low drift is crucial. Minimizing drift caused by vibrations or thermal drift over time will ensure laser alignment to the desired spot and also reduce any potential downtime due to misalignment and errors. Having a locking mechanism on these mounts can also prevent misalignment of the beam, especially during shipping and also if anything else happens during usage.
HVM industrial mounts are recommended for robust long term usage in compact space. The Suprema® mirror mount is excellent for its stainless steel construction that gives better thermal performance than an aluminum mirror mount. Ultra-fine 254-TPI adjusters provide alignment sensitivity as low as 1.5 arc sec. For applications that are really concerned about the thermal changes that can be potentially caused by prolonged high powered laser usage, the ZeroDrift™ version will compensate for some thermal changes as well. For those mirror mounts that need to be set-and-forget for a long period of time, we recommend the MFM flexure mirror Mount. These are excellent for their small footprint so that machine size can be reduced.
- Suprema® Stainless Steel Mirror Mounts: the industry's best thermal performance for long-term stability.
- M-Series Aluminum Mirror Mounts: the new standard for affordable mounts.
![]() Suprema |
![]() M-Series |
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| Optic Diameters | 0.5, 1 and 2 in. | 0.5, 1 and 2 in. |
| Resolution | 50, 100, 127 and 254 TPI | 100 TPI |
| Angular Range | ±7° | ±4° |
| Material | Stainless Steel | Aluminum |
| Drive Types | Knob Hex Key Exchangeable Actuators |
Knob Hex Key |
| Lockable Versions | Yes | Yes |
| Other Versions | Clear-Edge Front- and Rear-Loading Right- and Left-Handed Low Wavefront Distortion ZeroDrift™ |
Clear-Edge Front- and Rear-Loading Right- and Left-Handed |
- HVM Top-Adjust Mirror Mounts: for use in compact spaces so your hands do not have to cross the beam path for adjustment.
- MFM Flexure Mirror Mounts: designed for "set and forget" applications.
![]() HVM-Series |
![]() MFM-Series |
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| Optic Diameters | 0.5, 1 and 2 in. | 0.5, 0.75 and 1 in. |
| Resolution | 80 and 100 TPI | 80 and 100 TPI |
| Angular Range | ±2.5°, ±3° and ±3.5° | ±2.5° |
| Material | Anodized Aluminum, Stainless Steel | Stainless Steel |
| Drive Types | Hex Key | Hex Key |
| Lockable Versions | Yes | No |
| Other Features | Front- and Rear-Loading Versions | Shock Resistant Front- and Rear-Loading Versions Adhesive wells for permanent mounting |
- A-Line™ Fixed Position Lens Mounts: fast, easy and economic mounting, aligning and focusing of optics.
- Compact Lens Positioners: ideal solution for applications with limited table space.
- LP Precision Multi-Axis Lens Positioners: highest performing lens positioners.
![]() A-Line |
![]() Compact |
![]() LP-Series |
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| Optic Diameters | 0.5 to 3 in. | 1 in. | 0.5, 1 and 2 in. |
| Resolution | - | 100 TPI | 100 TPI |
| Adjustments | Fixed | XY, XYZ, XYZθxθy | XY, XYZ, XYZθxθy |
| Material | Aluminum | Aluminum | Aluminum |
| Other Features | Self-aligning design Large clear aperture Compatible with A-Line alignment system |
Adapters for other optics Optional lock nuts |
Zero-freeplay XY mechanism True Gimbal adjustments Independent non-influencing locks Adapters for other optics |
- Ultima® Gimbaled Cube/Prism Mount: precision alignment of beamsplitter cubes and prisms.
- RSP High Performance Optic Rotation Mounts: smooth, continuous 360° rotation of optics.
![]() UGP-1 |
![]() RSP-Series |
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| Optic Size | 0.5 and 1 in. cube | 1 and 2 in. |
| Resolution | 100 TPI | 4 arc min |
| Angular Range | ±5° | 360° |
| Material | Aluminum | Aluminum |
| Drive Types | Knob w/ Hex Hole | Coarse: knurled edge Fine: knob |
| Lockable | Yes | Yes |
| Other Features | True gimbal motion Adapters for other optics |
Full ball bearing races Adapters for other optics |
- PX Forkless Optical Pedestals: Long-term stability of a pedestal at 1/3 the space.
| PX Post | PX Pedestal | ||
|---|---|---|---|
| Diameter | 1 in. | 1 in. with 1.25 in. flange | ![]() |
| Heights | 1, 2, 3 and 4 in. | ||
| Material | Stainless Steel | ||
| Other Features | Accessories for varying heights and mounting configurations | ||
Laser Beam Analysis
Even with the advantages that lasers provide over traditional tools, lasers systems can degrade over time, leading to reduced output power or a change in focus. This, in turn, could result in lower quality laser operations, including sintering. Therefore, it is very important to monitor your laser beam frequently, and the critical parameters of the laser should be checked before and after each important step of the laser manufacturing process.
Causes of Laser System Degradation
- Thermal Effects
- Debris from Process
- Vibrations and Shock
Criteria for Beam Analysis Instruments
There are three types of beam analysis instruments to monitor your laser: (1) sensors and detectors to measure power, (2) power meters to process the information provided by sensors and (3) beam profilers to determine focus position and other beam characteristics. Shown below are the main criteria for choosing such instruments.
Laser Sensors- Compatible with laser wavelength
- Power/energy range/density
- Beam size
- Calibrated power measurement
- Compatible with sensor
- Connect to system/PC
- Track process data over time
- Compare multiple measurements at once
- Measurement of multiple attributes
- Focal shift
- Focal spot size
- Laser power and power density
- Changes over time
- Laser propagation characteristics
- Speed of measurement
Thermal UV Power Sensors
Compact, fan-cooled UV sensors with high damage thresholds.
![]() FL250A-LP2-35 |
![]() F150(200)A-CM-16 |
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|---|---|---|
| Spectral Range | 250 to 2200 nm | 248 to 9400 nm |
| Power Range | 0.1 to 250 W | 0.3 to 200 W |
| Energy Range | 0.5 to 300 J | 0.05 to 200 J |
| Maximum Average Power Density | 20 kW/cm2 | 35 kW/cm2 |
| Maximum Energy Density (2 ms) | 130 J/cm2 | 45 J/cm2 |
| Aperture | Ø35 mm | Ø16 mm |
| Response Time | 2 s | 3 s |
| Application | Long pulse lasers | High rep rate lasers |
Power Meters
Ophir laser power and energy meters work on the smart plug principle. This means that almost any power meter can work – plug and play – with almost any of the wide range of Ophir optical sensors.
| Power Meters | Virtual Power Meters | ||
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![]() Centauri |
![]() StarBright Handheld |
![]() Juno+ |
![]() EA-1 |
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Beam Profilers
- NanoScan™ Scanning Slit Beam Profiler: The most versatile laser beam profiler, providing instantaneous feedback of beam parameters for CW and kHz pulsed lasers.
- SP932U Beam Profiling Camera: High resolution, real-time viewing and measuring of laser structure with highest accuracy in the industry.
![]() NanoScan™ |
![]() SP932U |
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|---|---|---|
| Spectral Range | 190 to 1100 nm | |
| Power Range | µW to > kW | |
| Damage Threshold | 50W/cm2 / 1J/cm2 for < 100ns pulse width | |
| Beam Sizes | 7 µm – 3 mm or 20 µm – 6 mm | 34.5 µm – 5.3 mm |
| Spatial Sampling Resolution | 5.3 nm – 18.3 µm | |
| Scan Frequency | Up to 20 Hz | |
| Pixels | 2048 x 1536 Effective Pixels 3.45 µm Pixel Size |
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| PC Interface | USB 2.0 | USB 3.0 |
| Other Features | Graphical user interface software included M2 Wizard software for quick calculation Integrated 200 mW power meter |
BeamGage® software included UltraCal™ correction algorithm Measures cross-sectional intensity 72 dB true dynamic resolution 24 Hz frame rate in 12-bit mode |
Motion Control
Galvanometer Scanners and Linear Positioners
- Advantages
- Used to steer laser
- Fast scanning (meters/sec) with sharp corners
- Limitations
- Limited field of view (~100-200 mm)
- Limited focal spot size (10-20 µm)
- Advantages
- Used to position target or…
- Used to position galvo(s)
- Large field of view
- Allows tight focal spots (<10 µm)
- Limitations
- Not as fast as galvos
Combined Galvo-Linear Positioners System
- Combines speed of galvos with FOV allowed by positioners
- Galvo and positioners can be synchronized with advanced motion controller
- Enables "stitching":
- Galvo process for "cells"
- Positioners place next cell as target
- Repeat galvo process
| Galvos | Linear Positioners | Combined System | |
|---|---|---|---|
| Speed & Acceleration | Fast | Not as fast | Fast |
| Field of View (FOV) | Limited | Large | Large |
| Focal Spot Size | Limited | Tighter | Tight |
- MKS offers a full range of positioners and motion controllers
- Galvos purchased separately – MKS controllers can interface with galvos
Guaranteed Motion Control Performance
- Stages that MKS ships meet or exceed the guaranteed specifications
- Metrology reports included with each stage (ASME B5.57 and ISO 230-2 standards)
- Typically, the product will perform ~2x better than the guarantee
XM-S Series Linear Motor Stages
High sensitivity and outstanding trajectory accuracy in a compact, robust and cost-effective package.

| XM-S Series | |
|---|---|
| Travel Range | 50 to 350 mm |
| Minimum Incremental Motion | 1 nm |
| Speed | 300 mm/s |
| Load Capacity | 100 to 300 N |
| Accuracy | ±0.2 to ±0.5 µm |
| Repeatability | ±0.03 to ±0.035 µm |
| Straightness & Flatness | ±0.37 to ±0.75 µrad |
| Other Features | Ironless Linear Motor Crossed-roller bearings |
GTS-V Series High Precision Vertical Positioner
Highly accurate, repeatable and fast vertical motion in a compact unit

| GTS-V Series | |
|---|---|
| Travel Range | 30 to 70 mm |
| Speed | 5-10 m/sec |
| Load Capacity | 40 to 70 N |
| Pitch | ±0.25 to ±0.80 µrad |
| Roll | ±0.25 to ±0.80 µrad |
| Accuracy | ±0.75 to ±1.75 µm |
| Repeatability | ±0.1 to ±0.5 µm |
| Other Features | Direct vertical guiding system Folded DC motor Unobstructed access to payload |
IMS Series Long-Travel Aluminum Linear Positioners
High load capacity, long travel, fast movement capable of high-duty cycles in industrial applications

| Stepper Motor | DC Motor | |
|---|---|---|
| Travel Range | 300 to 600 mm | |
| Speed | 100 m/sec | 200 mm/sec |
| Load Capacity | 600 N | |
| Pitch | ±37 to ±50 µrad | |
| Yaw | ±15 to ±30 µrad | |
| Accuracy | ±2.5 to ±4 µm | |
| Other Features | Double-row recirculating ball bearings Linear motor version available |
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ILS Series Mid-Travel Aluminum Linear Positioners
High load capacity, mid-travel, fast movement capable of high-duty cycles in light industrial applications

| Stepper Motor | DC Motor | |
|---|---|---|
| Travel Range | 50 to 250 mm | |
| Speed | 50 m/sec | 100 mm/sec |
| Load Capacity | 250 N | |
| Pitch | ±15 to ±42 µrad | |
| Yaw | ±12 to ±25 µrad | |
| Accuracy | ±0.6 to ±1.7 µm | |
| Other Features | Double-row recirculating ball bearings Linear motor version available |
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Motion Controllers
![]() XPS-D |
![]() XPS-RLD |
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Vibration Control
For applications that require holding alignments in place, we offer a comprehensive range of vibration isolation and damping solutions to ensure a stable system.
![]() Breadboards |
![]() Workstations |
![]() Table Systems |
![]() Tables and Legs |
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|---|---|---|---|---|
| Dimension | Few feet | Few feet | Several feet, custom sizes | Several feet, custom sizes |
| Thickness | Few inches | Few inches | Several inches, custom thickness | Several inches, custom thickness |
| Portability | Must be carried or placed on "cart" | Casters on legs are standard | Larger, heavier, optional casters | Larger, heavier, optional casters |
| Isolation | None | ✓ | ✓ | ✓ |
| Damping | ✓ | ✓ | ✓ | ✓ |
| Setup | Base model comes assembled | Base model comes assembled | Support frame included but not assembled May need help from riggers |
Tables, legs sold separately May need help from riggers |
Resources
Transforming VAT Polymerization AM Brochure(6.3 MB, PDF)

























