Hexapod, High Accuracy, 200 mm Diameter Platform, 6 kg Load, M6

The HXP100PHA-MECA 6-Axis Hexapod is a parallel kinematic motion device that provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. The HXP100PHA has a 6 kg centered load capacity and is a cost-effective solution to complex motion applications that demand repeatability and accuracy in up to six independent axes. Hexapods, in general, are high priced and complex devices that are difficult to implement. The HXP100PHA-MECA, on the contrary, is not only affordable but extremely easy to use and re-configure. Determine if the HXP100PHA-MECA is the right hexapod for your application by using Newport's free HexaViz Simulation Software. The HXP100PHA-MECA is compatible with our HXP100PHA-ELEC-D controller.

Specifications

Technical Specs

Type
High Accuracy
Size
Ø300 x 209 mm
Platform Diameter
200 mm
Centered Load Capacity
60 N
Travel Range X, Y, Z
±27.5, ±25, ±14 mm
Travel Range ΘX, ΘY, ΘZ
±11.5, ±10.5, ±19 °
Minimum Incremental Motion X, Y, Z
0.10, 0.10, 0.05 µm
Minimum Incremental Motion ΘX, ΘY, ΘZ
0.05, 0.05, 0.10 mdeg
Uni-directional Repeatability X, Y, Z - Typical
±0.10, ±0.10, ±0.05 µm
Uni-directional Repeatability X, Y, Z - Guaranteed
±0.15, ±0.15, ±0.075 µm
Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
±0.05, ±0.05, ±0.10 mdeg
Maximum Speed X, Y, Z
12, 10, 5 mm/s
Maximum Speed ΘX, ΘY, ΘZ
8, 8, 16 °/s
Accuracy XYZ, Guaranteed
±5.0, ±5.0, ±2.5µm
Yaw X, Y, Z - Guaranteed
±37, ±37, ±37 µrad
Pitch X, Y, Z - Guaranteed
±37.5, ±37.5, ±37.5 µrad
Rigidity X, Y, Z
3, 3, 24 N/µm

Bi-directional Repeatability (X,Y,Z), Typical
±0.25, ±0.25, ±0.125 µm
Bi-directional Repeatability (ΘX, ΘY, ΘZ), Typical
±0.125, ±0.125, ±0.25 mdeg
Bi-directional Repeatability X, Y, Z - Guaranteed
±0.50, ±0.50, ±0.25 µm
Connectors
DB25 - Male (6) and DB15 - Male (6)
Cable Length
3 m
Motor
DC Servo
Origin
Optical, close to lower limit
Origin Repeatability
X,Y,Z: ±5.0, ±5.0, ±2.5 µm
U,V,W: ±2.5, ±2.5, ±5.0 mdeg
Encoder Resolution
1Vpp 1.31µm pitch
Number of Axis
6
Weight
7.2 kg
Thread Type
M6
MTBF
5,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Type
High Accuracy
Size
Ø300 x 209 mm
Platform Diameter
200 mm
Centered Load Capacity
60 N
Travel Range X, Y, Z
±27.5, ±25, ±14 mm
Travel Range ΘX, ΘY, ΘZ
±11.5, ±10.5, ±19 °
Minimum Incremental Motion X, Y, Z
0.10, 0.10, 0.05 µm
Minimum Incremental Motion ΘX, ΘY, ΘZ
0.05, 0.05, 0.10 mdeg
Uni-directional Repeatability X, Y, Z - Typical
±0.10, ±0.10, ±0.05 µm
Uni-directional Repeatability X, Y, Z - Guaranteed
±0.15, ±0.15, ±0.075 µm
Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
±0.05, ±0.05, ±0.10 mdeg
Maximum Speed X, Y, Z
12, 10, 5 mm/s
Maximum Speed ΘX, ΘY, ΘZ
8, 8, 16 °/s
Accuracy XYZ, Guaranteed
±5.0, ±5.0, ±2.5µm
Yaw X, Y, Z - Guaranteed
±37, ±37, ±37 µrad
Pitch X, Y, Z - Guaranteed
±37.5, ±37.5, ±37.5 µrad
Rigidity X, Y, Z
3, 3, 24 N/µm

Bi-directional Repeatability (X,Y,Z), Typical
±0.25, ±0.25, ±0.125 µm
Bi-directional Repeatability (ΘX, ΘY, ΘZ), Typical
±0.125, ±0.125, ±0.25 mdeg
Bi-directional Repeatability X, Y, Z - Guaranteed
±0.50, ±0.50, ±0.25 µm
Connectors
DB25 - Male (6) and DB15 - Male (6)
Cable Length
3 m
Motor
DC Servo
Origin
Optical, close to lower limit
Origin Repeatability
X,Y,Z: ±5.0, ±5.0, ±2.5 µm
U,V,W: ±2.5, ±2.5, ±5.0 mdeg
Encoder Resolution
1Vpp 1.31µm pitch
Number of Axis
6
Weight
7.2 kg
Thread Type
M6
MTBF
5,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Resources & Downloads

Drawings And Cad

HXP100P-MECA(902.4 kB, PDF)

Manuals

XPS-D Features Manual.pdf(8.7 MB, PDF)
XPS-D Configuration Manual.pdf(5.6 MB, PDF)
XPS-D User Interface Manual.pdf(8.3 MB, PDF)
HXP100P-MECA User Manual(10.5 MB, PDF)
XPS-D and HXP-ELEC-D Start-Up Manual.pdf(8.2 MB, PDF)
XPS Unified - Programmer's Manual.pdf(6.8 MB, PDF)

Application Notes

Hexapod Solutions for Mass Transfer & Die Repair in Micro LED Manufacturing Equipment(2.1 MB, PDF)
Precision Alignment in Photonic Device Assembly and Testing(2.6 MB, PDF)

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