Vacuum Compatible Nanopositioning Piezo Stack Actuators
Vacuum Compatible Nanopositioning Piezo Stack Actuators
Our vacuum compatible piezo stack actuators are equipped with a highly reliable, multi-layer, low-voltage, piezoelectric transducer stack. They are internally pre-loaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic vacuum applications.
- Sub-nanometer positioning resolution
- Ultra-high load capacity
- Vacuum compatible
- Optional strain-gauge position feedback See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | NPA100SGV6 Vacuum Compatible Piezo Stack Actuators Piezo Actuator, Vacuum, 0.1 mm Travel Range, Strain-gauge | |||||
| NPA100V6 Vacuum Compatible Piezo Stack Actuators Piezo Stack Actuator, Vacuum, 0.1 mm Travel Range, Open Loop | |||||
 | NPA25SGV6 Vacuum Compatible Piezo Stack Actuators Piezo Stack Actuator, Vacuum, 0.025 mm Travel Range, Strain-gauge | |||||
| NPA25V6 Vacuum Compatible Piezo Stack Actuators Piezo Stack Actuator, Vacuum, 0.025 mm Travel Range, Open-loop | |||||
 | NPA50SGV6 Vacuum Compatible Piezo Stack Actuators Piezo Stack Actuator, Vacuum, 0.05 mm Travel Range, Strain-gauge | |||||
| NPA50V6 Vacuum Compatible Piezo Stack Actuators Piezo Stack Actuator, Vacuum, 0.05 mm Travel Range, Open Loop |
Features
Sub-Nanometer Positioning Resolution
With positioning resolution as low as 0.05 nm, the NPA Piezo Stack Actuators make ultra-fine adjustments with resolution only limited by the noise of the control electronics.
Ultra-High Load Capacity
NPA Piezo Stack Actuators can generate large forces up to 1000 N which make them particularly useful for machine tools, active vibration isolation, or adaptive mechanics.
Optional Strain-Gauge for Closed-Loop Operation
Closed-loop versions feature high resolution strain-gauge position sensors for highly accurate and repeatable motion which also compensates for actuator creep. The assembly is done as a full Wheatstone bridge and is temperature insensitive. The closed-loop devices can be used in either open or closed-loop control.
Resources
Manuals
NanoPositioning NPX & PSM User's Manual(139.7 kB, PDF)
Literature
Nanopositioning Solutions(9.3 MB, PDF) NPA Data Sheet(1.1 MB, PDF)
Technical Notes
Tech Note - CH2 Piezo Theory-Static Properties.pdf(243.9 kB, PDF) Tech Note - CH3 Piezo Theory-Dynamic Properties.pdf(125.8 kB, PDF) Tech Note - Piezo Theory-Physics and Design.pdf(559 kB, PDF)
