Hexapod, Vacuum Compatible, 125 mm Diameter Platform, 5 kg Load, M6 The HXP50V6-MECA Vacuum Compatible 6-Axis Hexapod is a parallel kinematic motion device that provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. The HXP50V6 has a 5 kg centered load capacity and is a cost-effective solution to complex motion applications that demand repeatability and accuracy in up to six independent axes. Contrary to the image of hexapods being complex and highly priced, the HXP50 hexapod is not only affordable but extremely easy to use. Determine if the HXP50V6-MECA is the right hexapod for your application by using Newport's free HexaViz Simulation Software . Order with HXP50V6-ELEC-D.
Note that mechanics are designed to operate to 10-6 Torr, but the connectors are not vacuum compatible. For vacuum compatible connectors, outgassing tests or for faster delivery, call Newport (800) 222 6440.
Specifications Type
Vacuum Compatible
Size
Ø200 x 151 mm
Platform Diameter
125 mm
Centered Load Capacity
50 N
Travel Range X, Y, Z
±17, ±15, ±7 mm
Travel Range ΘX, ΘY, ΘZ
±9, ±8.5, ±18 °
Minimum Incremental Motion X, Y, Z
0.2, 0.2, 0.1 µm
Minimum Incremental Motion ΘX, ΘY, ΘZ
0.1, 0.1, 0.2 mdeg
Uni-directional Repeatability X, Y, Z - Typical
±0.20, ±0.20, ±0.20 µm
Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
±0.40, ±0.40, ±0.20 mdeg
Maximum Speed X, Y, Z
2, 1.9, 0.8 mm/s
Maximum Speed ΘX, ΘY, ΘZ
2.4, 2.4, 6 °/s
Rigidity X, Y, Z
2, 2, 25 N/µm
Bi-directional Repeatability (X,Y,Z), Typical
±1.0, ±1.0, ±0.50 µm
Connectors
DB25 Male (6)
Cable Length
1.5 m
Motor
Stepper motor
Origin
Optical, close to lower limit
Origin Repeatability
X,Y,Z: ±5.0, ±5.0, ±2.5 µm U,V,W: ±2.5, ±2.5, ±5.0 mdeg
Encoder Resolution
0.42283 µm
Minimum Incremental Motion
Open Loop/Closed Loop X,Y,Z: 0.2/0.8, 0.2/0.8, 0.1/0.4 µm U,V,W: 0.1/0.4, 0.1/0.4, 0.2/0.8 mdeg
Number of Axis
6
Weight
2.2 kg
Vacuum Compatibility
10-6 Torr
Thread Type
M6
MTBF
5,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE
Type
Vacuum Compatible
Size
Ø200 x 151 mm
Platform Diameter
125 mm
Centered Load Capacity
50 N
Travel Range X, Y, Z
±17, ±15, ±7 mm
Travel Range ΘX, ΘY, ΘZ
±9, ±8.5, ±18 °
Minimum Incremental Motion X, Y, Z
0.2, 0.2, 0.1 µm
Minimum Incremental Motion ΘX, ΘY, ΘZ
0.1, 0.1, 0.2 mdeg
Uni-directional Repeatability X, Y, Z - Typical
±0.20, ±0.20, ±0.20 µm
Uni-directional Repeatability ΘX, ΘY, ΘZ - Typical
±0.40, ±0.40, ±0.20 mdeg
Maximum Speed X, Y, Z
2, 1.9, 0.8 mm/s
Maximum Speed ΘX, ΘY, ΘZ
2.4, 2.4, 6 °/s
Rigidity X, Y, Z
2, 2, 25 N/µm
Bi-directional Repeatability (X,Y,Z), Typical
±1.0, ±1.0, ±0.50 µm
Connectors
DB25 Male (6)
Cable Length
1.5 m
Motor
Stepper motor
Origin
Optical, close to lower limit
Origin Repeatability
X,Y,Z: ±5.0, ±5.0, ±2.5 µm U,V,W: ±2.5, ±2.5, ±5.0 mdeg
Encoder Resolution
0.42283 µm
Minimum Incremental Motion
Open Loop/Closed Loop X,Y,Z: 0.2/0.8, 0.2/0.8, 0.1/0.4 µm U,V,W: 0.1/0.4, 0.1/0.4, 0.2/0.8 mdeg
Number of Axis
6
Weight
2.2 kg
Vacuum Compatibility
10-6 Torr
Thread Type
M6
MTBF
5,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE
Resources & Downloads
3D Product Models Download CAD Files 2D Product Drawings HXP50V6-MECA (283.8 kB, PDF) Telecom Data Brochure (4.9 MB, PDF) Motion in 3-D: Newport Hexapod Coordinate Systems (476.8 kB, PDF) Maintaining HXP Position after Controller Reboot (44.4 kB, ZIP) Maintaining HXP Position after Controller Reboot (67.3 kB, PDF) HexaViz Hexapod Brochure (2.5 MB, PDF) XPS-D Features Manual.pdf (8.7 MB, PDF) XPS-D Configuration Manual.pdf (5.6 MB, PDF) XPS-D User Interface Manual.pdf (8.3 MB, PDF) GroupPositionCurrentGet command and HXP controller.pdf (915.7 kB, PDF) HXP50V6-MECA User Manual (5 MB, PDF) HXP Series Hexapod Brochure (2.3 MB, PDF) XPS-D and HXP-ELEC-D Start-Up Manual.pdf (8.2 MB, PDF) Hexapod Solutions for Mass Transfer & Die Repair in Micro LED Manufacturing Equipment (2.1 MB, PDF) Vaccum Compatible Products Brochure (3.8 MB, PDF) XPS Unified - Programmer's Manual.pdf (6.8 MB, PDF) Precision Alignment in Photonic Device Assembly and Testing (2.6 MB, PDF)