In comparison to stacked stages, hexapods offer an easy, elegant solution to complex, multi-axis motion in a compact construction. Our vacuum compatible hexapods are rated for use at 10-6 Torr.
- Vacuum compatible to 10-6 Torr
- 200 or 300 mm diameter sizes
- Single device with 6 independent axes of motion See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | HXP100V6-MECA Vacuum Compatible HexapodsHexapod, Vacuum Compatible, 200 mm Diameter Platform, 20 kg Load, M6 | |||||
![]() | HXP50V6-MECA Vacuum Compatible HexapodsHexapod, Vacuum Compatible, 125 mm Diameter Platform, 5 kg Load, M6 |
Specifications
Features
Parallel Kinematic Motion
Hexapods are ingenious and effective solutions to complex motion applications that require high load capacity and accuracy in up to six independent axes. Parallel kinematic motion devices provide six degrees of freedom (X, Y, Z, pitch, roll, and yaw) in a compact solution to multi-axis positioning. As an alternative to stacking multiple stages, hexapods have no moving cables, are lower in overall cost, and offers error compensated motion.
High Precision Actuators
The quality of actuators has a critical impact on the overall motion performance of a hexapod. Drawing on over 55 years of Newport's expertise in actuators, the top plate of HXP hexapods is driven by 6 industry-proven, high performance actuators with encoder feedback at the leadscrew nut to provide precise minimum incremental motion, low backlash and fast speed.
Innovative Actuator Joints
Of equal importance to overall motion performance as the actuators are the 12 joints that connect these actuators to the base plate and moving top plate. Rather than using orindary universal joints, HXP hexapods utilize ceramic spherical joints to ensure constant preload over full travel, enhancing rigidity that reduces material stress, while improving performance and avoiding corrosion. The result is a hexapod that is more rigid with higher load capacity compared to other similarily sized hexapods.
Two Virtual Centers of Rotation
Hexapod motion is defined by a global coordinate system and a local coordinate system, making programming motion more intuitive for standard research, metrology and manufacturing applications. Users can program up to two virtual pivot points without calculating coordinate system transformations or powering down the controller. The two virtual pivot points are origins of the two definable coordinates systems: Tool, which moves with the top plate, and Work, which is a stationary reference. This allows the user to conceptualize how the sample and tool are manipulated. For this 6-axis device, complex motion is simplified for easy user program development.
RightPath™ Trajectory Control
In parallel kinematic devices, motion is synchronized on the hexapod legs; all legs start and stop at the same time and always complete the same part of the trajectory. As a result, the motion does not necessarily translate into a straight trajectory in the World coordinate system. For small motion the effect is negligible, but for larger motion it could become noticeable. Newport engineers devised a solution to minimize the runout of hexapods through RightPath™ Trajectory Control. This firmware feature is unique to Newport hexapods and enables scanning motion along three types of trajectory functions – line, arc or rotation – in either Work or Tool.
Vacuum Hexapod Applications
Remote positioning of a component inside a vacuum chamber is typically accomplished with a motion system. For particular applications that require more than 4 axis of motion, Newport offers these standard, off-the-shelf vacuum compatible hexapods (up to 10-6 Torr) to meet this demand.
These trajectory functions facilitate motion with:
• Minimal runout (deviation from the trajectory) during the move
• Continuous multi-dimensional motion path
• Constant velocity along the trajectory path
• Equal trajectory acceleration at start and end of move: acceleration = deceleration
• Calculations are performed before motion so there is no lag time
HexaViz™ Simulation Software
Our HexaViz hexapod simulator allows you to discover which Newport Hexapod model best fits your application needs before ordering. Newport's FREE HexaViz Hexapod Simulation Software provides an easy-to-use virtual hexapod interface to evaluate travel range, load capacity, force, and torque characteristics. For more information, please see our HexaViz brochure.
Hexapod Motion Controllers
Our HXP-ELEC high-performance multi-axis hexapod motion controllers are dedicated for the use with Newport Hexapods. The HXP-ELEC is based on the same hardware as the Newport XPS Universal High Performance Motion Controller/Driver, however it is preconfigured with special firmware to command the Hexapod mechanics. Firmware features are designed for simplified programming and integration. Choose the controller with the same prefix as the hexapod you would like to control. See accessory table below for compatible controllers.
Non-Vacuum Compatible HXP Hexapods
The HXP series is also available in a High Accuracy Hexapod version that gurantees accuracy values – this enables their use in applications where position accuracy is required. The HXP series is also available in a High Load Hexapod version offering up to 450 kg of centered load capacity. And for other non-vacuum applications, the High Precision HXP series is a versatile solution.
Accessories
Hexapod Motion Controllers
The following hexapod motion controllers are compatible with these high precision hexapods. Choose the controller version with the same prefix as the hexapod you would like to control.
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | HXP100V6-ELEC-D Motion Controller, Hexapod, HXP100V6-MECA | |||||
![]() | HXP50V6-ELEC-D Motion Controller, Hexapod, HXP50V6-MECA |
Resources
Literature
HexaViz Hexapod Brochure(2.5 MB, PDF) HXP100 Data Sheet(3 MB, PDF) HXP Series Hexapod Brochure(2.3 MB, PDF)
Application Notes
Space Optics and Metrology with Hexapods(431 kB, PDF) Hexapod with Image Derotator Brings Innovative Metrology Tools to Industrial Manufacturing(530.2 kB, PDF) Hexapod Solutions for Mass Transfer & Die Repair in Micro LED Manufacturing Equipment(2.1 MB, PDF) Precision Alignment in Photonic Device Assembly and Testing(2.6 MB, PDF)
Technical Notes
Motion in 3-D: Newport Hexapod Coordinate Systems(476.8 kB, PDF) Maintaining HXP Position after Controller Reboot(67.3 kB, PDF)
Manuals
HXP50V6-MECA User Manual(5 MB, PDF) HXP100V6-MECA User Manual(7.6 MB, PDF)



















