Motorized Linear Stage, 600 mm Travel, DC Motor, Linear Encoder, 1/4-20
The IMS600CCHA Linear Stage with DC Motor uses the same industry-proven technology as the ILS Series. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life; FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. An integral linear scale provides 0.1 μm resolution feedback, improving precision. This stage is ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining.
Specifications
Travel Range
600 mm
Maximum Speed
200 mm/s
Minimum Incremental Motion
200 nm
Centered Load Capacity
600 N
Axial Load Capacity (+Cx)
30 N
Inverse Axial Load Capacity (-Cx)
-30 N
Accuracy, Typical
±3.5 µm
Accuracy, Guaranteed
±6.5 µm
Uni-directional Repeatability, Typical
±0.12 µm
Uni-directional Repeatability, Guaranteed
±0.25 µm
Bi-directional Repeatability, Typical
±0.20 µm
Bi-directional Repeatability, Guaranteed
±0.5 µm
Pitch, Typical
±50 µrad
Pitch, Guaranteed
±125 µrad
Compliance in Pitch
0.2 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±75 µrad
Compliance in Yaw
1 µrad/Nm
Compliance in Roll
1 µrad/Nm
Drive Type
DC Motor
Feedback
Linear Encoder
Origin Repeatability
±0.1 µm
Cable Length
5 m
Thread Type
1/4-20
Weight
22 kg
MTBF
20,000 h (25% load, 30% duty cycle)
Maximum Power Consumption
170 W
Compliance
RoHS 3, CE
Travel Range
600 mm
Maximum Speed
200 mm/s
Minimum Incremental Motion
200 nm
Centered Load Capacity
600 N
Axial Load Capacity (+Cx)
30 N
Inverse Axial Load Capacity (-Cx)
-30 N
Accuracy, Typical
±3.5 µm
Accuracy, Guaranteed
±6.5 µm
Uni-directional Repeatability, Typical
±0.12 µm
Uni-directional Repeatability, Guaranteed
±0.25 µm
Bi-directional Repeatability, Typical
±0.20 µm
Bi-directional Repeatability, Guaranteed
±0.5 µm
Pitch, Typical
±50 µrad
Pitch, Guaranteed
±125 µrad
Compliance in Pitch
0.2 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±75 µrad
Compliance in Yaw
1 µrad/Nm
Compliance in Roll
1 µrad/Nm
Drive Type
DC Motor
Feedback
Linear Encoder
Origin Repeatability
±0.1 µm
Cable Length
5 m
Thread Type
1/4-20
Weight
22 kg
MTBF
20,000 h (25% load, 30% duty cycle)
Maximum Power Consumption
170 W
Compliance
RoHS 3, CE