Motorized Linear Stage, 500 mm Travel, DC Motor, Rotary Encoder, M6
The M-IMS500CC Linear Stage with DC Motor uses the same industry-proven technology as the ILS Series. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life; FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. Position is read with a 4000 pts/rev. encoder mounted directly on the screw. This stage is ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining. Specifications
Travel Range
500 mm
Maximum Speed
200 mm/s
Minimum Incremental Motion
1250 nm
Centered Load Capacity
600 N
Axial Load Capacity (+Cx)
30 N
Inverse Axial Load Capacity (-Cx)
-30 N
Accuracy, Typical
±3.0 µm
Accuracy, Guaranteed
±6.0 µm
Uni-directional Repeatability, Typical
±0.50 µm
Uni-directional Repeatability, Guaranteed
±0.65 µm
Bi-directional Repeatability, Typical
±0.75 µm
Bi-directional Repeatability, Guaranteed
±1.25 µm
Pitch, Typical
±37 µrad
Pitch, Guaranteed
±75 µrad
Compliance in Pitch
0.2 µrad/Nm
Travel Range
500 mm
Maximum Speed
200 mm/s
Minimum Incremental Motion
1250 nm
Centered Load Capacity
600 N
Axial Load Capacity (+Cx)
30 N
Inverse Axial Load Capacity (-Cx)
-30 N
Accuracy, Typical
±3.0 µm
Accuracy, Guaranteed
±6.0 µm
Uni-directional Repeatability, Typical
±0.50 µm
Uni-directional Repeatability, Guaranteed
±0.65 µm
Bi-directional Repeatability, Typical
±0.75 µm
Bi-directional Repeatability, Guaranteed
±1.25 µm
Pitch, Typical
±37 µrad
Pitch, Guaranteed
±75 µrad
Compliance in Pitch
0.2 µrad/Nm