Motorized Linear Stage, 500 mm Travel, DC Motor, Linear Encoder, M6
The M-IMS500CCHA Linear Stage with DC Motor uses the same industry-proven technology as the ILS Series. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life; FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. An integral linear scale provides 0.1 μm resolution feedback, improving precision. This stage is ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining.
Specifications
Travel Range
500 mm
Maximum Speed
200 mm/s
Minimum Incremental Motion
200 nm
Centered Load Capacity
600 N
Axial Load Capacity (+Cx)
30 N
Inverse Axial Load Capacity (-Cx)
-30 N
Accuracy, Typical
±2.5 µm
Accuracy, Guaranteed
±5.0 µm
Uni-directional Repeatability, Typical
±0.12 µm
Uni-directional Repeatability, Guaranteed
±0.25 µm
Bi-directional Repeatability, Typical
±0.20 µm
Bi-directional Repeatability, Guaranteed
±0.50 µm
Pitch, Typical
±37 µrad
Pitch, Guaranteed
±75 µrad
Compliance in Pitch
0.2 µrad/Nm
Travel Range
500 mm
Maximum Speed
200 mm/s
Minimum Incremental Motion
200 nm
Centered Load Capacity
600 N
Axial Load Capacity (+Cx)
30 N
Inverse Axial Load Capacity (-Cx)
-30 N
Accuracy, Typical
±2.5 µm
Accuracy, Guaranteed
±5.0 µm
Uni-directional Repeatability, Typical
±0.12 µm
Uni-directional Repeatability, Guaranteed
±0.25 µm
Bi-directional Repeatability, Typical
±0.20 µm
Bi-directional Repeatability, Guaranteed
±0.50 µm
Pitch, Typical
±37 µrad
Pitch, Guaranteed
±75 µrad
Compliance in Pitch
0.2 µrad/Nm
