XYZ Piezo Linear Stage, 100 µm Nanopositioning, Strain-gauge, Vacuum

The NPXYZ100SGV6 Vacuum Compatible Three Axis Nanopositioning Linear Stage is a 100 µm travel piezo-based stage providing nanometer resolution motion in XYZ. It is ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others. NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion. Due to the frictionless guide, NPX stages are maintenance-free, are not subject to wear and provide rapid response and fast settling performance making them suitable for use in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning.
The closed-loop version features a high resolution strain-gauge position sensor for highly accurate and repeatable motion, that also compensates for actuator creep. It uses a full Wheatstone bridge design and can be operated in either open or closed-loop control. Fastening is easy with tapped and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP. Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening.
Use with the NPC3SG Nanopositioning Amplifier.