dynamyx-rs-reticle-positioning-stage

DynamYX® RS Reticle Positioning Stage

Specifications

Technical Specs

Bearings
Vacuum/pressure air bearing
Drive Type
Ironless linear motor
Maximum Speed
400 mm/s

Weight
550 kg

Bearings
Vacuum/pressure air bearing
Drive Type
Ironless linear motor
Maximum Speed
400 mm/s

Weight
550 kg

Resources & Downloads

Literature

High Performance Air Bearing Stage Capabilities and Solutions(11.9 MB, PDF)