hybryx-hybrid-air-bearing-soft-isolation-systems

HybrYX™ HD High Dynamic, Hybrid Air Bearing XY Stage with Soft Isolation System

Specifications

Technical Specs

Motorized Axes
XY
Travel Range
X: 500 mm
Y: 320 mm
Maximum Speed
X: 1500 mm/s
Y: 2000 mm/s
Maximum Acceleration
X: 1.5 g
Y: 5 g
Centered Load Capacity
5 kg

Pitch, Typical
< 15 µrad
Yaw, Typical
< 15 µrad
MTBF
>40,000 hours (25% load, 30% duty cycle)

Motorized Axes
XY
Travel Range
X: 500 mm
Y: 320 mm
Maximum Speed
X: 1500 mm/s
Y: 2000 mm/s
Maximum Acceleration
X: 1.5 g
Y: 5 g
Centered Load Capacity
5 kg

Pitch, Typical
< 15 µrad
Yaw, Typical
< 15 µrad
MTBF
>40,000 hours (25% load, 30% duty cycle)

Resources & Downloads

Literature

High Performance Air Bearing Stage Capabilities and Solutions(11.9 MB, PDF)

Technical Articles

Bringing Hybrid Bonding Into Production(1.9 MB, PDF)