Search results for "air bearing"
SinguLYS - Single Axis Air Bearing Stage
- Ceramic (SiC) Construction Provides Low Mass, High Rigidity, and Excellent Thermal Stability
- Integrated Pressure-Vacuum Air Bearings and Linear Motor Drive for Clean Operation
- Compact Footprint With Self-Supporting Body and Three-Point Mounting
| Compare | Description | Avail. | Price | Qty. | |
|---|---|---|---|---|---|
| SinguLYS-B-1200Air Bearing Stage, SinguLYS B-1200 | ||||
 | SinguLYS-S-370Air Bearing Stage, SinguLYS S-370 |
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HybrYX XY Hybrid Air Bearing Stage
- Excellent price-to-performance value for demanding industrial OEM applications
- Great for scanning applications requiring ultra-low velocity ripple & dynamic following error
- True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
HybrYX G5 Large Substrate Positioning Stage
- Excellent price-to-performance value for demanding industrial OEM applications
- Ideal choice for scanning applications requiring ultra-low velocity ripple and dynamic following error
- True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
DynamYX® GT High-Throughput Stage
- Designed for high-throughput applications with aggressive duty-cycles
- Extremely rigid structure and high load capacity air bearings provides up to 2G acceleration
- High-efficiency XY linear motors drive moving masses through respective center of gravity locations
DynamYX® 300 Wafer Positioning Stage
- Designed for 300 mm wafer test, measurement & processing applications
- Acceleration: 0.75G X-Axis, 1.5G Y-Axis
- Velocity: 400mm/sec
DynamYX® RS Reticle Positioning Stage
- Ideal for reticle inspection and repair applications
- Acceleration: 0.25G X and Y Axes
- Velocity: 250mm/sec
HybrYX™ HD High Dynamic, Hybrid Air Bearing XY Stage with Soft Isolation System
- Excellent price-to-performance value for demanding industrial OEM applications
- Ideal for scanning applications requiring ultra-low velocity ripple & minimal dynamic following error
- True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
DynamYX® Datum® Ultra-High Performance Stage
- Acceleration: 3G X-Axis, 5G Y-Axis
- Velocity: 1000mm/sec
- Repeatability: ±25nm (long term)
S-2000A Pneumatic Vibration Isolators with Automatic Re-Leveling
- Top performance pneumatic isolators with vertical resonance as low as 1 Hz
- Hybrid chamber design maximizes isolation bandwidth and stability
- Highly accurate re-leveling improves repositioning after disturbance
| Compare | Description | Avail. | Price | Qty. | |
|---|---|---|---|---|---|
| S-2000A-423.5Vibration Isolator Set, Four 23.5 in. S-2000A Pneumatic Isolators | ||||
| S-2000A-428Vibration Isolator Set, Four 28 in. S-2000A Pneumatic Isolators | ||||
 | S-2000A-116Pneumatic Vibration Isolator, Automatic Re-leveling, 16 in. Height | ||||
| S-2000A-416Vibration Isolator Set, Four 16 in. S-2000A Pneumatic Isolators | ||||
| S-2000A-419.5Vibration Isolator Set, Four 19.5 in. S-2000A Pneumatic Isolators |
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NewDamp Elastomeric Vibration Isolators
- Super high damping factor for supporting high throughput motion
- Constant natural frequency design delivers much better isolation
- Alternative to pneumatic or mechanical spring mounts
| Compare | Description | Avail. | Price | Qty. | |
|---|---|---|---|---|---|
| ND41-BElastomeric Isolation Mount, NewDamp, 70-225 lb., Microlock Compatible | ||||
 | M-ND50-AElastomeric Isolation Mount, NewDamp, 17-28 lb., Microlock Compatible | ||||
 | M-ND01-AElastomeric Isolation Mount, NewDamp, 70-250 lb., Microlock Compatible | ||||
 | ND41-AElastomeric Isolation Mount, NewDamp, 70-225 lb., Microlock & X95 Rail | ||||
 | M-ND20-AElastomeric Isolation Mount, NewDamp, 45-250 lb., Microlock Compatible |
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