Nano-focusing objective stages are high-speed, piezoelectric-driven devices providing fast focusing and scanning over long travel ranges of up to 250 µm and are compatible with most microscopes and objective lenses. Typical applications include surface profilometry, high-resolution imaging, auto-focusing, scanning interferometry, and confocal microscopy.
- Sub-nanometer piezoelectric positioning resolution
- Piezoelectric travel range of 140 or 250 µm
- High resonant frequency for dynamic applications
- Precision parallelogram design minimizes beam offsets
- Available in vacuum versions See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | NPO140 Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 140 µm, Open-loop | |||||
![]() | NPO140-D Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 140 μm, Open-loop, XPS | |||||
![]() | NPO140SG Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 140 µm, Strain-gauge | |||||
![]() | NPO140SG-D Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 140 μm, Strain-gauge, XPS | |||||
![]() | NPO250 Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 250 µm, Open-loop | |||||
![]() | NPO250-D Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 250 μm, Open-loop, XPS | |||||
![]() | NPO250SG Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 250 µm, Strain-gauge | |||||
![]() | NPO250SG-D Nanofocusing Objective Lens Mounts Microscope Objective Stage, Nanofocusing, 250 μm, Strain-gauge, XPS | |||||
![]() | NPO250SGV6 Nanofocusing Objective Lens Mounts Nanofocusing Objective Stage, Vacuum Compatible, 250 µm, Strain-gauge | |||||
![]() | NPO250V6 Nanofocusing Objective Lens Mounts Nanofocusing Objective Stage, Vacuum Compatible, 250 µm, Open-Loop |
Features
Piezoelectric Transducer (PZT) Stack Actuators
NPO stages feature highly reliable, multi-layer, low-voltage, piezoelectric transducer (PZT) stacks, which are optimized for high-duty cycle operations. Image shifts and tilt are minimized by an FEA-modeled and precision EDM-cut parallelogram, solid-state flexure that ensures perfectly straight motion. The sophisticated guide also provides the highest possible stiffness for superior focus stability, higher frequency auto-focusing, shorter settling times and faster scans. NPO stages are maintenance-free and are not subject to wear.
Microscope Mounting
The NPO NanoFocusing stages mount between the turret and the microscope objective and add only 11.5 mm to the optical path length. All models can be used for standard and inverted microscopes. They feature standard RMS (0.800"-36) thread and are compatible with all Newport objective lenses.
Open-loop or Closed-loop Versions
NPO NanoFocusing stages are available as open-loop (no position feedback) or closed-loop versions with integrated position feedback. In open-loop, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezoelectric ceramic material. The closed-loop systems (model numbers ending in SG) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion. Also, the position feedback compensates for actuator creep. For highest position stability and highest temperature-insensitive performance, the sensors are assembled in a full Wheatstone bridge design. The closed-loop devices can be operated in open or closed-loop control.
Accessories
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | NPC3 | |||||
![]() | NPC3SG | |||||
![]() | XPS-D2 | |||||
![]() | XPS-DRVP1 1 |
- Plug XPS-DRVP1 into slots other than slot 1.
Resources
Technical Notes
Tech Note - Piezo Theory-Physics and Design.pdf(559 kB, PDF) Tech Note - CH2 Piezo Theory-Static Properties.pdf(243.9 kB, PDF) Tech Note - CH3 Piezo Theory-Dynamic Properties.pdf(125.8 kB, PDF)
Manuals
NanoPositioning NPX & PSM User's Manual(139.7 kB, PDF)
Literature
NPO Datasheet(1.6 MB, PDF)







