Piezo Stack Linear Translation Stages

The NPX Piezo Stack linear stages provide long travel and sub-nanometer resolution motion in one, two, or three axes all in a compact package. They feature rapid response and fast settling performance, allowing them to be used in dynamic processes such as high-frequency error compensation, tracking, fast stepping, or continuous scanning.

Sub-nanometer piezoelectric positioning resolution
Motion in X, XY, or XYZ
Piezoelectric travel range of up to 400 µm
Optional integrated strain-gauge for closed-loop operation
High resonant frequency for high dynamic applications
Available in vacuum versions

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Showing 20 of 20 total products

Compatibility:

Description	Compatibility	Travel Range	Axes of Travel	Feedback	Price
NPXY100Piezo XY Linear Stage, Open-loop, 100 µm Nanopositioning	UNIVERSAL	0.1 mm	XY	Open-loop	$4,274
NPXY100-DPiezo XY Linear Stage, Open-loop, 100 µm Nanopositioning, XPS	UNIVERSAL	0.1 mm	XY	Open-loop	$4,274
NPXY100SGPiezo XY Linear Stage, 100 µm Nanopositioning, Strain-gauge	UNIVERSAL	0.1 mm	XY	Strain-gauge	$5,161
NPXY100SG-DPiezo XY Linear Stage, 100 µm Nanopositioning, Strain-gauge, XPS	UNIVERSAL	0.1 mm	XY	Strain-gauge	$5,224
NPXYZ100XYZ Piezo Linear Stage, Open-loop, 100 µm Nanopositioning	UNIVERSAL	0.1 mm	XYZ	Open-loop	$3,782
NPXYZ100-DXYZ Piezo Linear Stage, Open-loop, 100 µm Nanopositioning, XPS	UNIVERSAL	0.1 mm	XYZ	Open-loop	$3,628
NPXYZ100SGPiezo XYZ Linear Stage, 100 µm Nanopositioning, Strain-gauge	UNIVERSAL	0.1 mm	XYZ	Strain-gauge	$7,359
NPXYZ100SG-DPiezo XYZ Linear Stage, 100 µm Nanopositioning, Strain-gauge, XPS	UNIVERSAL	0.1 mm	XYZ	Strain-gauge	$6,155
NPX200Piezo Linear Stage, 200 µm Nano-Positioning, Open-loop	UNIVERSAL	0.2 mm	X	Open-loop	$2,829
NPX200-DPiezo Linear Stage, 200 µm Nano-Positioning, Open-loop, XPS	UNIVERSAL	0.2 mm	X	Open-loop	$3,734
NPX200SGNanopositioning Stage, 200 µm, Strain-gauge	UNIVERSAL	0.2 mm	X	Strain-gauge	$3,936
NPX200SG-DNanopositioning Stage, 200 μm, Strain-gauge, XPS	UNIVERSAL	0.2 mm	X	Strain-gauge	$4,090
NPXY200Piezo XY Linear Stage, Open-loop, 200 µm Nanopositioning	UNIVERSAL	0.2 mm	XY	Open-loop	$5,441
NPXY200-DPiezo XY Linear Stage, 200 µm Nanopositioning, XPS	UNIVERSAL	0.2 mm	XY	Open-loop	$5,387
NPXY200SGPiezo XY Linear Stage, 200 µm Nanopositioning, Strain-gauge	UNIVERSAL	0.2 mm	XY	Strain-gauge	$7,359
NPXY200SG-DPiezo XY Linear Stage, 200 µm Nanopositioning, Strain-gauge, XPS	UNIVERSAL	0.2 mm	XY	Strain-gauge	$7,359
NPX400Piezo Linear Stage, 400 µm Nano-Positioning, Open-loop	UNIVERSAL	0.4 mm	X	Open-loop	$2,985
NPX400-DPiezo Linear Stage, 400 µm Nano-Positioning, Open-loop, XPS	UNIVERSAL	0.4 mm	X	Open-loop	$2,985
NPX400SGNanopositioning Stage, 400 µm, Strain-gauge	UNIVERSAL	0.4 mm	X	Strain-gauge	$4,803
NPX400SG-DNanopositioning Stage, 400 μm, Strain-gauge, XPS	UNIVERSAL	0.4 mm	X	Strain-gauge	$4,803

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Specifications

Open Loop NPX

Models	NPXY100	NPXYZ100	NPX200		NPX400
Axes of Travel	XY	XYZ	X	XY	X
Feedback	Open-loop	Open-loop	Open-loop	Open-loop	Open-loop
Open Loop Travel	100 µm	100 µm	200 µm	200 µm	400 µm
Open Loop Resolution	0.4 nm	0.4 nm	0.4 nm	0.4 nm	0.4 nm
Axial Load Capacity	110/95 N	40/40/32 N	16 N	40/40 N	64 N
Vertical Load Capacity	75 N	30 N	10 N	100 N	10 N
Axial Stiffness	1.1 N/µm / 0.95 N/µm	1 N/µm	0.08 N/µm	0.65 N/μm / 0.652 N/µm	0.16 N/µm
Capacitance	1.8 µF	1.8 µF	1.8 µF	5.2 µF	5.2 µF
Resonant Frequency, Unloaded	380/480 Hz	500/550/480 Hz	177 Hz	350/350 Hz	200 Hz
Cable Length	1 m	1 m	1 m	1 m	1 m
Weight	175 g	165 g	180 g	350 g	180 g
RoHS	Compliant	Compliant	Compliant	Compliant	Compliant

Strain Gauge NPX

Models	NPXY100SG			NPXY200SG
Axes of Travel	XY	XYZ	X	XY	X
Feedback	Strain-gauge	Strain-gauge	Strain-gauge	Strain-gauge	Strain-gauge
Open Loop Travel	100 µm	100 µm	200 µm	200 µm	400 µm
Open Loop Resolution	0.4 nm	0.4 nm	0.4 nm	0.4 nm	0.4 nm
Closed Loop Travel	80 µm	80 µm	160 µm	160 µm	320 µm
Closed Loop Resolution	4 nm	4 nm	4 nm	4 nm	4 nm
Closed Loop Repeatability, Typical	36 nm	30 nm
Axial Load Capacity	110/95 N	40/40/32 N	16 N	40/40 N	64 N
Vertical Load Capacity	75 N	30 N	10 N	100 N	10 N
Axial Stiffness	1.1 N/µm / 0.95 N/µm	1 N/µm	0.08 N/µm	0.65 N/μm / 0.652 N/µm	0.16 N/µm
Capacitance	1.8 µF	1.8 µF	1.8 µF	5.2 µF	5.2 µF
Resonant Frequency, Unloaded	380/480 Hz	500/550/480 Hz	177 Hz	350/350 Hz	200 Hz
Cable Length	2 m	2 m	2 m	2 m	1.2 m
Weight	175 g	160 g	180 g	350 g	180 g
RoHS	Compliant	Compliant	Compliant	Compliant	Compliant

Features

Sub-Nanometer Positioning Resolution

With positioning resolution as low as 0.2 nm, the NPX Piezo Stack linear stage make ultra-fine adjustments with resolution only limited by the noise of the control electronics.

Large Piezoelectric Travel Range

NPX Piezo Stack linear stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion and up to 400 µm travel range. Due to the frictionless guide principle, NPX Piezo Stack linear stages are maintenance-free and are not subject to wear. Furthermore, the output motion sensitivity is not affected by mechanical friction.

Optional Integrated Strain-Gauge for Closed-Loop Operation

The closed-loop systems (-SG models) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion which also compensates for actuator creep. The assembly is done as a full Wheatstone bridge and is temperature insensitive. The closed-loop devices can be used in either open or closed-loop control.

Vacuum Versions Available

The NPX Piezo Stack linear stages are available in vacuum compatible versions which can be used in vacuum (10^-6 Torr) environments.

Motion in X, XY, or XYZ

NPX Piezo Stack linear stages are available as X, XY, and XYZ motion systems. The multi-axis XY and XYZ devices utilize an advanced parallel motion principle, meaning all actuators act directly on the moving platform. Smaller form factor and lower inertia for faster motion can be achieved as opposed to other piezo systems with serial kinematics such as stacks of individual stages.

Accessories

Base Plates

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		NPX-BPBase Plate, Nanopositioning Translation Stages	UNIVERSAL			$164

Compatible Controllers and Driver Electronics

Description	Compatibility	Price
NPC1USBPiezo Stack Amplifier, Single Channel, Low Cost	UNIVERSAL	$1,425
NPC300DIGPiezo Stack Amplifier, Single Channel, 300 mA	UNIVERSAL	$14,750
NPC3Piezo Stack Amplifier, 3 Channel, Open-loop Position Control	UNIVERSAL	$6,117
NPC3SGPiezo Stack Amplifier, 3 Channel, Strain-Gauge Position Control	UNIVERSAL	$7,781
XPS-D2Universal Motion Controller, High Performance, 2-axis, Ethernet	UNIVERSAL	$8,643
XPS-D4Universal Motion Controller, High Performance, 4-axis, Ethernet	UNIVERSAL	$9,712
XPS-DRVP1Nano Positioning Drive Module, Piezo-Stack	UNIVERSAL	$1,180