XYZ Piezo Linear Stage, Open-loop, 100 µm Nanopositioning, XPS

The NPXYZ100-D Three Axis Nanopositioning Linear Stage is a 100 µm travel piezo-based linear stage providing nanometer resolution motion in XYZ. It is ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others. NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion. Due to the frictionless guide, NPX stages are maintenance-free, are not subject to wear and provide rapid response and fast settling performance making them suitable for use in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning. The resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezoelectric ceramic material. Fastening is accomplished by a number of threads and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP. Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening. These external forces could damage the stage.
Use with XPS controller. The XPS-DRVP1 driver card does not fit in slot 1 on the XPS-D or XPS-RLD, please use the other slots for this driver board.