New Hybrid Air Bearing XY Stage System, High Dynamic, Soft Isolation System

The HybrYX single plane XY hybrid stages are the latest addition to our air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. HybrYX-HD with Soft Isolation System is well suited for semiconductor wafer processing systems, as well as being an excellent choice for use in large substrate inspection and processing tools. The Soft Isolation System option allows the system to operate at higher speed & acceleration (High Dynamic) without sacrificing stability at the point of interest or inducing vibrations into the floor.