Elastomeric Isolation Mount, NewDamp, 100-450 lb., Microlock & X95 Rail

The M-ND40T-A NewDamp Elastomeric Isolator supports 45-200 kg loads and is based on cylindrical elements. They are the best option for applications requiring good isolation and short settling time with respect to horizontal motions while maintaining low tilt due to moving loads. The M-ND40T-A has a 67 mm height and a 76 x 76 mm base. By using custom profiled upper supports, these isolators can be easily tuned to particular load/frequency requirements. Breadboard microlock (Metric) and X95 rail (Metric) compatible.

Ideal Solution for High Throughput Motion or Machinery Applications

NewDamp isolators provide a remarkably high damping with loss factors around 0.5 to 0.8 at room temperatures in the 10–100 Hz frequency range. This level of damping is two to five times better than other commercial elastomers. The high damping factor makes them ideal for supporting and damping the high acceleration amplitudes produced by very high throughput stages used in wafer positioning, inspection and electronic manufacturing applications. NewDamp elastomers can be built into equipment isolation supports and even custom machinery feet.

Superior Constant Natural Frequency (CNF) Design

Constant Natural Frequency (CNF) is a complex property that reduces sensitivity to load deviations and offers a high degree of modal decoupling. The natural frequency of most elastomeric mounts lowers with increasing mass or increases with decreasing mass. This means that the vibration isolation characteristics will vary with load. NewDamp elastomeric isolators use special geometry profiled elastomers and mounting fixtures. These isolators accommodate changes in load with changes in stiffness which holds the stiffness to mass ratio constant. As a result, the CNF isolators deliver much better isolation than even softer conventional isolators do.

ND20 Natural frequency of vertical vibration vs. load.

Faster Settling Times

A remarkable property of NewDamp™ isolators is their ability to quickly attenuate the transient motions, thereby reducing the settling time of the equipment after the stage movements or other disturbances. The following comparison was made for a dual-axis air bearing stage mounted on a granite basis (total weight: 800 kg) and supported by four NewDamp™ ND40 isolators.

ND40 isolator settling time.

Super High Damping Material

NewDamp products exhibit a remarkably high damping with loss factors around 0.5 to 0.8 at room temperatures in the 10–100 Hz frequency range which is two to five times better than other commercial elastomers. The high damping factor makes them ideal for supporting and damping the high acceleration amplitudes produced by very high throughput stages used in wafer positioning and electronic manufacturing applications. NewDamp elastomers can be built into equipment isolation supports and even custom machinery feet.

Cleanroom Compatible Design

NewDamp is made from a highly engineered polyurethane U-16 compound that is fully cleanroom compatible. These products have been used in Class 100 Fabs to support wafer inspection and positioning systems.

Specifications

Technical Specs

Load Capacity per Isolator
200 kg
Minimum Isolator Load
45 kg
Isolator Height
67 mm
Interface Compatibility
Breadboard, Microlock, X95 Rail

Natural Frequency, Vertical Max.
21 Hz
Natural Frequency, Vertical Min.
12 Hz
Natural Frequency, Horizontal Max.
6 Hz
Natural Frequency, Horizontal Min.
4 Hz

Load Capacity per Isolator
200 kg
Minimum Isolator Load
45 kg
Isolator Height
67 mm
Interface Compatibility
Breadboard, Microlock, X95 Rail

Natural Frequency, Vertical Max.
21 Hz
Natural Frequency, Vertical Min.
12 Hz
Natural Frequency, Horizontal Max.
6 Hz
Natural Frequency, Horizontal Min.
4 Hz

Resources & Downloads

3D Product Models

2D Product Drawings

ND40T-A Drawing(165.4 kB, PDF)

Other

MKS EU ROHS3 - ND40T(226.3 kB, PDF)

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