Motorized Linear Stage, Steel, Stepper Motor, 200 mm Travel, Vacuum, M4 & M6
The MTN200PPV6 Linear Stage features an all-steel construction and combines high stiffness and thermal stability with a low profile design. This stepper drive version has 200 mm of travel and 0.1 µm Minimum Incremental Motion. MTN stages can bear up to 100 kg with an exceptional high axial load capacity up to 200 N. Features include: opposing single-row bearing surface, a diamond-corrected lead screw, a matched, precision-lapped nut and a non-migrating ball cage design. The nut design includes anti-backlash preloading and a sophisticated decoupling system ensuring little to no stage movement. The non-migrating ball cage design prevents any drift in vertical applications. Vacuum compatible to 10-6 Torr.
Note: The cable supplied with the stage is not vacuum compatible due to various feed-through configurations and customer preferences. Please contact Newport for vacuum compatible cable options.
Specifications
Travel Range
200 mm
Maximum Speed
20 mm/s
Minimum Incremental Motion
400 nm
Centered Load Capacity
1000 N
Axial Load Capacity (+Cx)
100 N
Inverse Axial Load Capacity (-Cx)
-21 N
Accuracy, Typical
±2.0 µm
Accuracy, Guaranteed
±2.5 µm
Uni-directional Repeatability, Typical
±0.50 µm
Uni-directional Repeatability, Guaranteed
±0.75 µm
Bi-directional Repeatability, Typical
±2.25 µm
Bi-directional Repeatability, Guaranteed
±2.75 µm
Pitch, Typical
±20 µrad
Pitch, Guaranteed
±40 µrad
Compliance in Pitch
6 µrad/Nm
Yaw, Typical
±17 µrad
Yaw, Guaranteed
±35 µrad
Compliance in Yaw
5 µrad/Nm
Compliance in Roll
4 µrad/Nm
Drive Type
Stepper Motor
Origin Repeatability
±5 µm
Cable Length
3 m
Vacuum Compatibility
10-6 Torr
Thread Type
M4 and M6
Weight
16.5 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Maximum Power Consumption
10 W
Compliance
RoHS 3, CE
Travel Range
200 mm
Maximum Speed
20 mm/s
Minimum Incremental Motion
400 nm
Centered Load Capacity
1000 N
Axial Load Capacity (+Cx)
100 N
Inverse Axial Load Capacity (-Cx)
-21 N
Accuracy, Typical
±2.0 µm
Accuracy, Guaranteed
±2.5 µm
Uni-directional Repeatability, Typical
±0.50 µm
Uni-directional Repeatability, Guaranteed
±0.75 µm
Bi-directional Repeatability, Typical
±2.25 µm
Bi-directional Repeatability, Guaranteed
±2.75 µm
Pitch, Typical
±20 µrad
Pitch, Guaranteed
±40 µrad
Compliance in Pitch
6 µrad/Nm
Yaw, Typical
±17 µrad
Yaw, Guaranteed
±35 µrad
Compliance in Yaw
5 µrad/Nm
Compliance in Roll
4 µrad/Nm
Drive Type
Stepper Motor
Origin Repeatability
±5 µm
Cable Length
3 m
Vacuum Compatibility
10-6 Torr
Thread Type
M4 and M6
Weight
16.5 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Maximum Power Consumption
10 W
Compliance
RoHS 3, CE