Motorized Rotation Stage, High Speed, High Accuracy, Low Profile

The RGA150MAP low-profile, large aperture and high accuracy rotary stage addresses the need for quick angle adjustments of wafers and vacuum chucks. Although specifically tailored to semiconductor applications, the RGA150MAP can also be utilized in other industrial applications, such as through hole imaging/inspection or laser processing, automation or any general positioning application that requires fast positioning .

This is the mapped version of RGA150 that allows to achieve ±1mdeg accuracy.

Specifications

Technical Specs

Angular Range
360°
Maximum Speed
1800°/s
Minimum Incremental Motion
0.01 mdeg
Peak Motor Torque
11 Nm
Centered Load Capacity
50 N
Bi-directional Repeatability, Typical
±0.0975 mdeg
Accuracy, Guaranteed
±1 mdeg
Wobble, Typical
±12 µrad

Eccentricity, Typical
±0.5 µm
Eccentricity, Guaranteed
±1 µm
MTBF
20,000 hours @ 30 % duty cycle
Cable Length
5 m
Aperture Diameter
90 mm
Weight
4.5 kg
Compliance
RoHS 3, CE, UKCA

Angular Range
360°
Maximum Speed
1800°/s
Minimum Incremental Motion
0.01 mdeg
Peak Motor Torque
11 Nm
Centered Load Capacity
50 N
Bi-directional Repeatability, Typical
±0.0975 mdeg
Accuracy, Guaranteed
±1 mdeg
Wobble, Typical
±12 µrad

Eccentricity, Typical
±0.5 µm
Eccentricity, Guaranteed
±1 µm
MTBF
20,000 hours @ 30 % duty cycle
Cable Length
5 m
Aperture Diameter
90 mm
Weight
4.5 kg
Compliance
RoHS 3, CE, UKCA

Resources & Downloads

3D Product Models

2D Product Drawings

RGA150 DWG.pdf(695.8 kB, PDF)
RGA150 Direct Drive Rotation Stage Datasheet(2.1 MB, PDF)
Methods to Determine Optimized Scaling Acceleration(3.4 MB, PDF)
RGA150 Rotation Stage User Manual(4.5 MB, PDF)

Other

RGA UKCA Declaration of Conformity.pdf(67 kB, PDF)

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