Motorized Vertical Stage, Compact, 4.8 mm, DC Servo with Tachometer, 4-40 and 8-32

The VP-5ZA vertical stage is an ultra-low profile, precision vertical stage with minimum incremental motion capability of 60 nm, high-responsiveness and perfectly straight trajectory over 4.8 mm travel. Features include: an innovative inclined-plane design; a cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensuring high speed motion with minimum settling time; a high-resolution linear scale directly attached to the moving rail, eliminating all drive-train induced motion errors; and two pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion. A standard 3-point mounting interface for a wafer chuck is provided as well. Manual vertical adjustments can be made using a flat screw driver for convenience. Typical applications include: semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. The VP-5ZA is compatible with the VP-25X linear stages and other Newport positioning products. For mounting to optical tables or to the ILS linear stages, use the optional base plate VP-BP.

Build Low Profile XYZ Stage Stacks

Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any direction.

Keep Payload Over the Bearings

The lifting approach of the VP-5ZA allows centering of the payload over the bearings and close to the position feedback. This avoids any cantilevered loads that cause angular deformations and results in more precise motion with a higher load capacity.

A VP-5ZA stage mounted on top of an ILS High-Performance Mid-Range Travel Linear Stage with optional VP-BP base plate.

Efficient Inclined Plane Design

Using a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings and 2 pairs of vertically mounted double-row linear ball bearing slides result in pure vertical motion.

Broad Stage Compatibility

A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or to the ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be conveniently made using a flat screw driver.

High Torque DC Motor

An efficient, high torque DC motor with a precision preloaded, long-life, ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours.

Specifications

Technical Specs

Travel Range
4.8 mm
Minimum Incremental Motion
0.06 µm
Maximum Speed
5 mm/s
Centered Load Capacity
50 N
Accuracy, Typical
±0.6 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.10 µm
Bi-directional Repeatability, Guaranteed
±0.25 µm
Uni-directional Repeatability, Typical
±0.06 µm
Uni-directional Repeatability, Guaranteed
±0.15 µm
Drive Screw Pitch
1 mm
Encoder Resolution
0.0196 µm
Limit Switches
Optical
Origin
Optical, centered
Origin Repeatability
±0.1 µm

Pitch, Typical
±30 µrad
Pitch, Guaranteed
±50 µrad
Compliance in Pitch
45 µrad/Nm
Roll, Typical
±30 µrad
Roll, Guaranteed
±100 µrad
Compliance in Roll
50 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±50 µrad
Compliance in Yaw
10 µrad/Nm
Cable Length
1.5 m
Thread Type
4-40 and 8-32
Weight
2.4 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Travel Range
4.8 mm
Minimum Incremental Motion
0.06 µm
Maximum Speed
5 mm/s
Centered Load Capacity
50 N
Accuracy, Typical
±0.6 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.10 µm
Bi-directional Repeatability, Guaranteed
±0.25 µm
Uni-directional Repeatability, Typical
±0.06 µm
Uni-directional Repeatability, Guaranteed
±0.15 µm
Drive Screw Pitch
1 mm
Encoder Resolution
0.0196 µm
Limit Switches
Optical
Origin
Optical, centered
Origin Repeatability
±0.1 µm

Pitch, Typical
±30 µrad
Pitch, Guaranteed
±50 µrad
Compliance in Pitch
45 µrad/Nm
Roll, Typical
±30 µrad
Roll, Guaranteed
±100 µrad
Compliance in Roll
50 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±50 µrad
Compliance in Yaw
10 µrad/Nm
Cable Length
1.5 m
Thread Type
4-40 and 8-32
Weight
2.4 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Resources & Downloads

3D Product Models

2D Product Drawings

A Diamond in the Rough: Industrial Diamond Cutting and Processing with a 4-Axis Precision Motion System(517.1 kB, PDF)
VP-5ZA-S(135.4 kB, PDF)
VP-5ZA_M4M6-S(56.9 kB, PDF)
VP-5ZA Vertical Linear Stage User's Manual(1.5 MB, PDF)
VP-5ZA Data Sheet.pdf(1.7 MB, PDF)
Workstation for Laser Direct-Write Processing(4.4 MB, PDF)
Building a High Performance Non-contact Optical Surface Metrology System(400.4 kB, PDF)
Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF)

Related Products

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Requires <quickview data-class="quickview-link" data-code="XPS-DRV11" data-type="product">XPS-DRV11</quickview> driver module
Requires <quickview data-class="quickview-link" data-code="XPS-DRV11" data-type="product">XPS-DRV11</quickview> driver module

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