VP-5ZA Precision Vertical Linear Stages
VP-5ZA Precision Vertical Linear Stages
The VP-5ZA is an ultra-low profile, precision vertical translation stage ideally suited for semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. Based on the industry-proven technology used in the VP-25X linear stages, the VP-5ZA offers highly reliable motion with nanometer sensitivity, high responsiveness, and a perfectly straight trajectory.
- 4.8 mm of precision vertical motion with unique inclined plane concept
- Ultra-low profile design for compact XYZ configurations
- Unobstructed access to the moving platform from any direction
- Highly repeatable and accurate motion with integrated linear encoder
- Excellent 60 nm minimum incremental motion
- Plug and play ESP compatibility See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | M-VP-5ZA Precision Vertical Stages, VP SeriesMotorized Vertical Stage, Compact, 4.8 mm, DC Servo with Tachometer, M3 and M4 | |||||
| VP-5ZA Precision Vertical Stages, VP SeriesMotorized Vertical Stage, Compact, 4.8 mm, DC Servo with Tachometer, 4-40 and 8-32 |
Compatible Controllers
Compatible motion controllers for the VP-5ZA stage are:
- XPS-RLD Motion Controller (2 or 4 Axis): Requires an XPS-DRV11 Driver Module.
- XPS-D Motion Controller (2, 4, 6 or 8 Axis): Requires an XPS-DRV11 Driver Module.
- ESP302 Motion Controller (1, 2, or 3 Axis): Plug and Play compatible with ESP302 Motion Controller.
- SMC100CC Single Axis DC Motor Controller.
See our Stage-Controller Compatibility technical note for complete stages and controllers compatibility.
Features
Build Low Profile XYZ Stage Stacks
Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any direction.
Keep Payload Over the Bearings
The lifting approach of the VP-5ZA allows centering of the payload over the bearings and close to the position feedback. This avoids any cantilevered loads that cause angular deformations and results in more precise motion with a higher load capacity.
Efficient Inclined Plane Design
Broad Stage Compatibility
A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or to the ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be conveniently made using a flat screw driver.
High Torque DC Motor
Accessories
Mounting
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | VP-BP Universal Base Plate, VP Series Stages |
Resources
Application Notes
Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF) Building a High Performance Non-contact Optical Surface Metrology System(400.4 kB, PDF) Workstation for Laser Direct-Write Processing(4.4 MB, PDF) A Diamond in the Rough: Industrial Diamond Cutting and Processing with a 4-Axis Precision Motion System(517.1 kB, PDF)
Manuals
VP-5ZA Vertical Linear Stage User's Manual(1.5 MB, PDF)
