An extensive set of compensation features are available to the user including backlash, linear error and error mapping in single, 2D, or 3D. All compensations are corrected dynamically at each servo cycle, updated at the rate of 20 kHz. This broad selection of options transforms the most basic positioner into a high performance device; thus increasing the accuracy and performance of any motion application culminating in more reliable results.

The Line-arc trajectory is a motion path defined by a combination of straight and curved segments (available only for positioners in XY groups) such that constant speed is maintained throughout the entire region of interest. Sequential execution of the lines-arc trajectories eliminates discontinuities. A dedicated function performs a precheck of the trajectory to ensure optimized and safe execution within the positioners' parameters. The spline trajectory executes a Catmull-Rom spline on an XYZ group, passing through user-specified points with 3rd order polynomial segments at a constant speed. Similar to Line-arc trajectory, spline trajectory has functions for trajectory prechecking. The PVT-mode is the most flexible mode for creating complex trajectories. In PVT, a trajectory element is defined by the end position (P) and end speed (V) of each positioner plus the duration for the element (T). The controller then calculates the cubic function trajectory that will pass through all defined positions at the defined times and velocities. PVT is a powerful tool for any kind of trajectory with varying speeds and for trajectories with nonlinear motion devices.

The XPS features four channels of 14-Bit analog-to-digital converters which can be integrated with a motion process using a TCL script. The analog inputs can be converted to directly control the position or speed of a motion axis via external analog inputs. This is critical in precision alignment or auto-focusing routines which require real-time feedback from other devices such as power meters, vision systems, or other sensors. Besides higher communication speed, the A-to-D conversion is internal to the XPS, therefore no processing burden is added to the host PC or the communication link. Consequently, this feature can improve process development and throughput.