Piezo Linear Stage, 27 mm travel, Vacuum Compatible

The Agilis™ AG-LS25-27V6 is a high precision, miniature, piezo motor driven linear stage. The piezo motor is directly coupled to the moving carriage, with no intermediate mechanisms, but held in for true set and forget long term stability. The AG-LS25-27 features 27 mm travel, 100nm MIM and with the supplied M2 screws and washers, is compatible with the SDS25 and DS25 manual linear stages. Precision motion is achieved by calibrated, pre-stressed linear ball bearings. The thermally matched stainless steel design and precision manufactured bearing surfaces provide ripple-free, low friction linear travel and angular deviations better than 200 μrad in any axis.
Use with either the Agilis AG-UC2 handheld, AG-UC8 or AG-UC8PC controllers.

Note: The connector supplied with the stage is not vacuum compatible due to various feed-through configurations and customer preferences. Please contact Newport for vacuum compatible connector options.

Multi-Axis Stage Configurations

Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the , 90 degree angle bracket for building XZ and XYZ stage configurations. Attention this bracket is not compatible with the AG-LS25-27 (as Z-axis). For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. The AG-LS25-27 & AG-LS25-27V6 must be positioned at the bottom of the stack (X-axis). The AG-LS25 & AG-LS25V6 stages can be stacked on top of the AG-LS25-27(V6) as the Y-axis, or as the Z-axis using the 339233, 90 degree angle bracket. Please note that the 339233, 90 degree angle bracket, is anodized and not vacuum compatible. An XZ stage stack is shown.

50 nm Minimum Incremental Motion

The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.

Vacuum Compatible Versions

The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10^-6 Torr) environments.

Set-and-Forget Long-Term Stability

The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.

Ripple-Free and Low Friction Travel

The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.

Specifications

Technical Specs

Travel Range
27 mm
Axes of Travel
X
Maximum Speed
0.5 mm/s
Minimum Incremental Motion
100 nm
Centered Load Capacity
2.5 N
Vertical Load Capacity
1.5 N
Holding Force
4 N
Bearings
Ball Bearings
Material
Stainless Steel

Cable Length
1.2 m
Vacuum Compatibility
10^-6 Torr
Limit Switches
Proprietary electrical switches
Pitch
±100 µrad
Yaw
±100 µrad
Weight
125 g
Operating Temperature
10 to 35°C

Travel Range
27 mm
Axes of Travel
X
Maximum Speed
0.5 mm/s
Minimum Incremental Motion
100 nm
Centered Load Capacity
2.5 N
Vertical Load Capacity
1.5 N
Holding Force
4 N
Bearings
Ball Bearings
Material
Stainless Steel

Cable Length
1.2 m
Vacuum Compatibility
10^-6 Torr
Limit Switches
Proprietary electrical switches
Pitch
±100 µrad
Yaw
±100 µrad
Weight
125 g
Operating Temperature
10 to 35°C

Resources & Downloads

Drawings And Cad

AG-LS25-27-S(232.3 kB, PDF)

Literature

Agilis™ Series Piezo Motor Driven Positioners(1.7 MB, PDF)
Vaccum Compatible Products Brochure(3.8 MB, PDF)

Manuals

Agilis Piezo Motor Driven Components User Manual(2.6 MB, PDF)

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