Agilis™ Piezo Motor Driven Linear Stages

The Agilis^™ Piezo Motor linear stages are high precision miniature stages featuring Newport’s proprietary Agilis piezo motor. With ultra-high adjustment sensitivity, convenient programmable operation, and compact design, Agilis stages provide outstanding motion performance at the cost of a high quality manual stage.

Small minimum incremental motion
Set-and-forget stability when not in use
Ripple-free with low friction travel
Available with direct read encoder and CONEX controller
Available in vacuum compatible versions

See All Features

Description	Compatibility	Price
AG-LS25 Agilis™ Piezo Motor Linear StagesPiezo Linear Stage, 12 mm travel	UNIVERSAL	$907
AG-LS25-27 Agilis™ Piezo Motor Linear StagesPiezo Linear Stage, 27 mm travel	UNIVERSAL	$1,279
AG-LS25-27V6 Agilis™ Piezo Motor Linear StagesPiezo Linear Stage, 27 mm travel, Vacuum Compatible	UNIVERSAL	$1,782
AG-LS25V6 Agilis™ Piezo Motor Linear StagesPiezo Linear Stage, 12 mm travel, Vacuum Compatible	UNIVERSAL	$1,344

Specifications

Features

Multi-Axis Stage Configurations

Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the 339233, 90 degree angle bracket for building XZ and XYZ stage configurations. Attention this bracket is not compatible with the AG-LS25-27 (as Z-axis). For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. The AG-LS25-27 & AG-LS25-27V6 must be positioned at the bottom of the stack (X-axis). The AG-LS25 & AG-LS25V6 stages can be stacked on top of the AG-LS25-27(V6) as the Y-axis, or as the Z-axis using the 339233, 90 degree angle bracket. Please note that the 339233, 90 degree angle bracket, is anodized and not vacuum compatible. An XZ stage stack is shown.

Integrated Linear Encoder with CONEX Controller Version

Newport also offers a version of the 27-mm travel Agilis linear stage with a built-in direct read linear encoder and integrated CONEX controller, the CONEX-AG-LS25-27P. Its closed-loop control provides a typical bi-directional repeatability of 0.2 µm and 0.2 µm minimum incremental motion.

50 nm Minimum Incremental Motion

The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.

Vacuum Compatible Versions

The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10^-6 Torr) environments.

Set-and-Forget Long-Term Stability

The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.

Ripple-Free and Low Friction Travel

The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.

Accessories

Agilis Controllers

Description	Compatibility	Price
AG-UC2 Motor Controller, Piezo, 2 Axis, Agilis™, Hand-held	UNIVERSAL	$586
AG-UC8 Motor Controller, Piezo, 8 Axis, Agilis™	UNIVERSAL	$1,076
AG-UC8PC Motor Controller, Piezo, 8-Axis, Agilis™, OEM, USB/RS232/RS485	UNIVERSAL	$986

Agilis Accessories

Description	Compatibility	Price
339233 Angle Bracket, 90 Degree, Closed Corner, UMR3 Stages, EQ3.02	METRIC	$104
B-2B Adaptor Plate, 25x25 or 40x40 mm Stage to Optical Table or 65x65 mm Stage	IMPERIAL	$48
M-B-1.25 Adaptor Plate, 25x25 mm Stage to 40x40 mm Stage	METRIC	$56
M-B-2C Adaptor Plate, 25x25 mm Stage to Optical Table or 65x65 mm Stage	METRIC	$56