Micrometer Adapter, Piezoelectric, 140 µm, Strain-gauge

Piezo Fine Adjustment Drive for Manual Actuators

The NPM140SG Piezoelectric Micrometer Adapter provides nanometer positioning capability for manual products. This adapter mounts to the actuator seat on the stage and is mechanically compatible with all Newport stages and mounts with a 0.375 inch (9.5mm) diameter mounting flange. Coarse adjustment is done with the manual screw. The final and fine adjustment is accomplished by controlling the piezo voltage of the NPM140. The extraordinary long travel range of 140 μm is provided by a sophisticated wire-EDM flexure system, which also serves as a linear guide for the actuator tip. The NPM140SG can be operated in open or closed-loop mode. The resolution in open-loop mode is in the sub-nanometer range. The NPM140SG features a high resolution strain-gauge position sensor for highly accurate and repeatable closed-loop motion. Also, the position feedback compensates for piezo stack creep. For highest position stability and highest temperature-insensitive performance, the sensor is assembled in a full Wheatstone bridge design. Since this micrometer adapter holds the manual screw 22 mm back from its normal position, micrometers or screws with longer than 22mm are recommended for use in order to utilize the full travel of the manual stage or mount.
Use with the NPC3SG Nanopositioning Amplifier.

Specifications

Technical Specs

Travel Range
140 µm
Axial Load Capacity
100 N
Load Capacity, Pull
150 N
Axial Stiffness
0.4 N/µm
Capacitance
1.7
Resonant Frequency
670.0
Closed Loop Repeatability
35 nm

Closed Loop Resolution
1 nm
Open Loop Resolution
0.1 nm
Closed Loop Travel Range
90 µm
Cable Length
2 m
Weight
0.125 kg

Travel Range
140 µm
Axial Load Capacity
100 N
Load Capacity, Pull
150 N
Axial Stiffness
0.4 N/µm
Capacitance
1.7
Resonant Frequency
670.0
Closed Loop Repeatability
35 nm

Closed Loop Resolution
1 nm
Open Loop Resolution
0.1 nm
Closed Loop Travel Range
90 µm
Cable Length
2 m
Weight
0.125 kg

Resources & Downloads

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