The XML350-S Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 350mm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring, precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications requiring excellent dynamic response.
The XMS-S stage line is intended to be used with the XPS-D controller. Associated driver module and cable kit is required and must be purchased separately for all –S stages (see Accessories section below).
Ideal for Laser Processing Applications
XM stages are ideal for applications such as laser micromachining, marking, cutting, and nano-patterning. This video shows two XM stages stacked in a 2-axis (XY) system driven by a Newport XPS controller for complex, smooth, ultra high precision motion synchronized with a galvo scanner.
Ultra-Precision in 3 Axes
XM Series direct drive stages provide ultra high precision motion for the most demanding applications. This video shows an assembly of two XM stages and one XMS-V vertical stage providing 3 axes (XYZ) of motion which could be used for applications such as focusing, sensor test/calibration, direct laser lithography, and precision assembly.
Command 1 nm Motion Steps
The ultra precision design and Heidenhain glass linear scale make the XM linear stage series capable of consistent commanded 1 nm MIM in a controlled environment.
XM-S Stages are capable of 1-nm incremental motion in a controlled environment using an XPS-D controller.
Innovative Center-Driven, Ironless, Direct Drive Linear Motor
Unlike screw-driven stages, the XM employs a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultra smooth velocity control and provides higher efficiency compared to alternative stage designs. This results in significantly less heat generation, which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM also has the benefit of a sophisticated length decoupling of the magnetic track from the stage carriage.
XM stages provide exceptional speed stability in continuous scanning or laser machining applications. Shown is the speed of an XMS50 gathered at a rate of 1 kHz using an interferometer.
Matched Pairs of Anti-creep Crossed Roller Bearings for Ultra-Accuracy
To ensure the most accurate trajectory control, XM stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. In addition, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.
Accuracy of a XMS50-S stage after linear error correction, measured dynamically at a 10-KHz rate while the stage was moving at a 100 mm/s speed.
T-Shaped Carriage Design for Optimum XY Assemblies
The T-shaped carriage used on the XM provides the optimum solution for precision XY assemblies without impacting the stage preload. It is also more robust and tolerant to non-ideal mounting conditions than stages with a C-shaped carriage design.
