The XM Series of ultra-performance linear stages delivers dynamic performance capable of consistent, reliable 1-nm minimum incremental motion for travel ranges of 50 to 350 mm in a compact, cost-effective package. XM is the ultimate solution for the most demanding manufacturing and test and measurement applications. These stages can meet 24/7 production requirements for applications such as semiconductor wafer inspection, sensor test and calibration, laser machining, ultra-precision assembly and many other demanding and ground-breaking systems.
- Ultra-high performance with 1-nm minimum incremental motion
- Non-contact, direct-drive system for ultra-precision, high dynamics and reliability
- Sub-nm, high precision glass scale encoder with 80-nm repeatability
- Extra-large, ironless, high-efficiency linear motor minimizes heat generation
- Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | XML210-S XM Ultra-Precision Aluminum Linear Motor StagesMotorized Linear Stage, Linear Motor, 210 mm Travel, 300 N Load, M4 and M6 | |||||
![]() | XML350-S XM Ultra-Precision Aluminum Linear Motor StagesMotorized Linear Stage, Linear Motor, 350 mm Travel, 300 N Load, M4 and M6 | |||||
![]() | XMS100-S XM Ultra-Precision Aluminum Linear Motor StagesMotorized Linear Stage, Linear Motor, 100 mm Travel, 100 N Load, M4 and M6 | |||||
![]() | XMS160-S XM Ultra-Precision Aluminum Linear Motor StagesMotorized Linear Stage, Linear Motor, 160 mm Travel, 100 N Load, M4 and M6 | |||||
![]() | XMS50-S XM Ultra-Precision Aluminum Linear Motor StagesMotorized Linear Stage, Linear Motor, 50 mm Travel, 100 N Load, M4 and M6 |
Compatible Controllers
Compatible motion controllers for these XM series linear motor/direct drive driven stages are:
- XPS-RLD Motion Controller (2 or 4 Axis): Requires an XPS-DRV11 Driver Module and XPS-DK22 Cable Kit.
- XPS-D Motion Controller (2, 4, 6 or 8 Axis): Requires an XPS-DRV11 Driver Module, and XPS-DK22 Cable Kit.
See our Stage-Controller Compatibility technical note for complete stages and controllers compatibility.
Specifications
Features
Ideal for Laser Processing Applications
XM stages are ideal for applications such as laser micromachining, marking, cutting, and nano-patterning. This video shows two XM stages stacked in a 2-axis (XY) system driven by a Newport XPS controller for complex, smooth, ultra high precision motion synchronized with a galvo scanner.
Ultra-Precision in 3 Axes
XM Series direct drive stages provide ultra high precision motion for the most demanding applications. This video shows an assembly of two XM stages and one XMS-V vertical stage providing 3 axes (XYZ) of motion which could be used for applications such as focusing, sensor test/calibration, direct laser lithography, and precision assembly.
Innovative Center-Driven, Ironless, Direct Drive Linear Motor
Matched Pairs of Anti-creep Crossed Roller Bearings for Ultra-Accuracy
Granite Base for Ultra Surface Flatness
The flatness of the surface is a major factor in the positioning accuracy and repeatability of a motion system. Lapped granite plates are among the flattest, commercially available surfaces. Granite’s tight flatness tolerance and extreme hardness make it logical option to complement Newport’s Ultra-Precision Linear Motor XM series stage. The GB series granite base plates feature 3 point mounting, to make-up for non-flat tables. Edge handles facilitate handling and positioning the base plate on the work surface.
Error Mapping Services
For critical positioning applications, Newport offers error mapping upon request for XM series stages driven by our XPS advanced motion controller. We will measure, implement, and verify the results of this error map that will individually optimize each stage's position accuracy. In addition, multi-axis error mapping is also available. Measurements are made at 20.0 ±0.2 °C. A certificate of calibration will be provided with your stage. Actual data may also be provided upon request.
High Accuracy Linear Glass Scale for Ultra-Repeatable Motion
Precision Manufacturing for Ultra-Performance
Space Saving High Reliability Design
Resources
Manuals
XM-S Linear Motor Stages User's Manual(1.6 MB, PDF) Cable Kits User's Manual.pdf(1.9 MB, PDF)
Literature
XM-S Linear Motor Stage Datasheet(2.4 MB, PDF) Telecom Data Brochure(4.9 MB, PDF) Mini Laser Machining Brochure 2016(1.4 MB, PDF) XPS Error Compensation Tech Note(919.6 kB, PDF) Laser Machining Brochure 2018(3.4 MB, PDF)
Application Notes
Motorized Alignment System Brings a New Light into Optical Fiber(787.2 kB, PDF) Fiber Bragg Grating Fabrication with femtoFBG(1.5 MB, PDF) Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF) Photon Echo Spectroscopy(315.6 kB, PDF) High Speed Automated Optical Inspection (AOI) System(611 kB, PDF) Large Holographic Grating Inspection With High Accuracy XY Stages(637.2 kB, PDF) Optical Inspection With XY Stages in Lithography Machine System(221 kB, PDF) Workstation for Laser Direct-Write Processing(4.4 MB, PDF) Surface Metrology.pdf(134.1 kB, PDF)




















