Motorized Linear Stage, Linear Motor, 160 mm Travel, 100 N Load, M4 and M6

The XMS160-S Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 160 mm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM-S stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications with high dynamic response.
The XMS-S stage line is intended to be used with the XPS-D controller. Associated driver module and cable kit is required and must be purchased separately for all –S stages (see Accessories section below).
Ideal for Laser Processing Applications
XM stages are ideal for applications such as laser micromachining, marking, cutting, and nano-patterning. This video shows two XM stages stacked in a 2-axis (XY) system driven by a Newport XPS controller for complex, smooth, ultra high precision motion synchronized with a galvo scanner.
Ultra-Precision in 3 Axes
XM Series direct drive stages provide ultra high precision motion for the most demanding applications. This video shows an assembly of two XM stages and one XMS-V vertical stage providing 3 axes (XYZ) of motion which could be used for applications such as focusing, sensor test/calibration, direct laser lithography, and precision assembly.
Innovative Center-Driven, Ironless, Direct Drive Linear Motor
Matched Pairs of Anti-creep Crossed Roller Bearings for Ultra-Accuracy
Resources & Downloads
3D Product Models
2D Product Drawings
Motorized Alignment System Brings a New Light into Optical Fiber(787.2 kB, PDF) Workstation for Laser Direct-Write Processing(4.4 MB, PDF) High Speed Automated Optical Inspection (AOI) System(611 kB, PDF) Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF) Mini Laser Machining Brochure 2016(1.4 MB, PDF) Methods to Determine Optimized Scaling Acceleration(3.4 MB, PDF) Telecom Data Brochure(4.9 MB, PDF) Fiber Bragg Grating Fabrication with femtoFBG(1.5 MB, PDF) XMS160-S(449.3 kB, PDF) XM-S Linear Motor Stages User's Manual(1.6 MB, PDF) XM-S Linear Motor Stage Datasheet(2.4 MB, PDF) Surface Metrology.pdf(134.1 kB, PDF) Cable Kits User's Manual.pdf(1.9 MB, PDF) Laser Machining Brochure 2018(3.4 MB, PDF)
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|---|---|---|---|---|---|---|
| XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver | ||||||
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