ILS-LM 250 N Load Aluminum Linear Motor Stages
ILS-LM 250 N Load Aluminum Linear Motor Stages
The ILS-LM series linear motor stages are designed for self-supporting applications with travel ranges from 100 to 300 mm. The driving element is a centered, high efficiency 3-phase, synchronous, ironless linear motor that provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws. These stages offer a high performance yet cost-effective solution for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining.
- High speed, high acceleration, and high responsiveness with minimum wear
- FEM-optimized aluminum body for high stiffness and minimal thermal expansion
- Efficient and reliable linear motor provides high torque and smooth motion
- Non-contact linear encoder provides 10 nm MIM
- 150 mm shorter than a screw-driven stage, making it more compact and space efficient See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | ILS100LM-S ILS-LM 250 N Load Aluminum Linear Motor StagesMotorized Linear Stage, 100 mm Travel, Linear Motor, 1/4-20 Thread | |||||
| ILS200LM-S ILS-LM 250 N Load Aluminum Linear Motor StagesMotorized Linear Stage, 200 mm Travel, Linear Motor, 1/4-20 Thread | |||||
| ILS300LM-S ILS-LM 250 N Load Aluminum Linear Motor StagesMotorized Linear Stage, 300 mm Travel, Linear Motor, 1/4-20 Thread | |||||
| M-ILS100LM-S ILS-LM 250 N Load Aluminum Linear Motor StagesMotorized Linear Stage, 100 mm Travel, Linear Motor, M6 Thread | |||||
| M-ILS200LM-S ILS-LM 250 N Load Aluminum Linear Motor StagesMotorized Linear Stage, 200 mm Travel, Linear Motor, M6 Thread | |||||
| M-ILS300LM-S ILS-LM 250 N Load Aluminum Linear Motor StagesMotorized Linear Stage, 300 mm Travel, Linear Motor, M6 Thread |
Compatible Controllers
Compatible motion controllers for these linear motor driven stages are:
- XPS-RLD Motion Controller (2 or 4 Axis): Requires XPS-DRV02 Driver Module, XPS-DK26 Cable Kit and E5820A Encoder Adapter.
- XPS-D Motion Controller (2, 4, 6 or 8 Axis): Requires an XPS-DRV02 Driver Module, XPS-DK26 Cable Kit and E5820A Encoder Adapter.
Specifications
Features
Linear Motor for High Speed and Performance
The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor as the driving element. This drive system is noise-free and provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws. Also, the ILS-LM is more than 150 mm shorter than a comparable screw driven stage. This is the optimum solution for space constrained applications that require high throughput, high reliability and ultra-quiet operation.
Hard Stoppers
ILS-LM stages use electrical end-of-run and rubber bumper hard stoppers to stop the carriage as smoothly as possible at travel end. The overtravel allowed by the bumpers is 3.5 mm, and when used with Newport XPS controllers, any commanded motion out of the travel range is not allowed.
Recirculating Ball Bearing Slides
FEM-Optimized Aluminum Body
Finite element method (FEM) was used to optimize the structural design of the ILS-LM stage aluminum body allowing for extreme stiffness and minimizing bi-metal bending without compromising weight. The rigid body reduces deflection under load, allowing for the highest performance possible in an aluminum stage design. FEM optimized IMS-LM stages are also available which offer longer travel ranges, higher load capacities and larger moving platforms.
Error Mapping Services
For critical positioning applications, Newport offers error mapping upon request for these linear motor stages driven by our XPS advanced motion controller. We will measure, implement, and verify the results of this error map that will individually optimize each stage's position accuracy. In addition, multi-axis error mapping is also available. Measurements are made at 20.0 ±0.2°C. A certificate of calibration will be provided with your stage. Actual data may also be provided upon request.
Linear Encoder with Nanometer Resolution
Precision position feedback is supplied by a very repeatable linear scale mounted in the stage. The encoder signals are interpolated by Newport’s XPS motion controller with nanometer resolution for outstanding position sensitivity, repeatability and stability. A home position is incorporated on the same scale, avoiding the use of additional electronics or mechanics for improved reliability and accuracy.
Metrology Report Included at No Additional Cost
ILS Stage Motor Options
ILS Series stages are available with the following motors:
- Stepper Motor (ILS-BPP) - For less demanding applications, a stepper motor can be a more economical solution than a DC motor.
- High-torque DC motor (ILS-CC) - Best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio, DC motors are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability.
- Linear Motor (ILS-LM) - The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor. This drive system is noise-free and provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws.
| ILS-CC (DC Motor) | ILS-BPP (Stepper Motor) | ILS-LM (Linear Motor) | |
|---|---|---|---|
| Travel Range (mm) | 50 / 100 / 150 / 200 / 250 | 50 / 100 / 150 / 200 / 250 | 100 / 200 / 300 |
| Maximum Speed (mm/s) | 100 | 50 | 500 |
| Minimum Incremental Motion (nm) | 1000 | 1000 | 10 |
| Uni-directional Repeatability, Guaranteed (µm) | ±0.5 | ±0.5 | |
| Bi-directional Repeatability Guaranteed (µm) | ±1.00 | ±1.0 | ±0.3 |
| Accuracy, Guaranteed (µm) | ±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0 | ±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0 | ±1.5 / ±2.0 / ±2.5 |
Accessories
Compatible Controller, driver and cable kit
Based on axis required, choose a specific XPS-D or XPS-RLD controller to pair with the stage.
Along with the controller, driver module, cable kit and encoder adapter are required.
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | E5820A Encoder Adapter, XPS-D, DB15 to HD26, For VP-25XL | |||||
 | XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver | |||||
 | XPS-DK26 Cable Kit, For Stages ILS-LM-S, RGV100-S, and XPS-DRV02 Driver | |||||
 | XPS-DRV02 PWM Drive Module, Brushless Motors | |||||
 | XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver |
Cable Management
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | ILS300LM-CF Cable, Flat for ILS-LM, 300mm travel | |||||
 | ILS300LM-CFXY Cable, Flat for ILS-LM, 300mm XY travel | |||||
 | ILS300LM-CH Cable Chain, for ILS-LM, 300 mm Travel | |||||
 | ILS300LM-CHXY Cable Chain, for ILS-LM, 300 mm XY travel |
Resources
Application Notes
A Diamond in the Rough: Industrial Diamond Cutting and Processing with a 4-Axis Precision Motion System(517.1 kB, PDF) XY-Theta Motion System For Laser Scribing on LED Wafer(1.3 MB, PDF)
Manuals
ILS300LM-CFXY Flat Cable Management Kit Assembly Instruction(573.1 kB, PDF) ILS-LM-S Motor Stages User's Manual(1.4 MB, PDF) Cable Kits User's Manual.pdf(1.9 MB, PDF)
Technical Notes
Methods to Determine Optimized Scaling Acceleration(3.4 MB, PDF) Stage and Controller Compatibility Guide
Literature
ILS-LM-S Data Sheet.pdf(1.4 MB, PDF) XPS Error Compensation Tech Note(919.6 kB, PDF)
