Motorized Linear Stage, 100 mm Travel, Linear Motor, M6 Thread

The M-ILS100LM-S Linear Motor Stage feature a robust design with 100 mm of high performance travel, M6 threaded mounting holes, and low cost design, making it a cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing, or laser machining. Associated driver module and cable kit is required and must be purchased separately (see Accessories secton below).

Linear Motor for High Speed and Performance

The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor as the driving element. This drive system is noise-free and provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws. Also, the ILS-LM is more than 150 mm shorter than a comparable screw driven stage. This is the optimum solution for space constrained applications that require high throughput, high reliability and ultra-quiet operation.

FEM-Optimized Aluminum Body

Finite element method (FEM) was used to optimize the structural design of the ILS-LM stage aluminum body allowing for extreme stiffness and minimizing bi-metal bending without compromising weight. The rigid body reduces deflection under load, allowing for the highest performance possible in an aluminum stage design. FEM optimized IMS-LM stages are also available which offer longer travel ranges, higher load capacities and larger moving platforms.

Recirculating Ball Bearing Slides

The recirculating ball bearing slides provide excellent payload capabilities and longer life with accurate linear trajectory. It mitigates the issue of ball cage migration, which is typically found on linear ball bearings or crossed roller bearings.

Linear Encoder with Nanometer Resolution

Precision position feedback is supplied by a very repeatable linear scale mounted in the stage. The encoder signals are interpolated by Newport’s XPS motion controller with nanometer resolution for outstanding position sensitivity, repeatability and stability. A home position is incorporated on the same scale, avoiding the use of additional electronics or mechanics for improved reliability and accuracy.

Hard Stoppers

ILS-LM stages use electrical end-of-run and rubber bumper hard stoppers to stop the carriage as smoothly as possible at travel end. The overtravel allowed by the bumpers is 3.5 mm, and when used with Newport XPS controllers, any commanded motion out of the travel range is not allowed.