Motorized Vertical Stage, Ultra-Precision Linear Motor, 100 mm, 100 N

The XMS100V stage is comprised of a standard XMS100 stage mounted on a high flatness (surface flatness within 5 µm) vertical plate or a bracket and a low friction air cylinder connected to the carriage. The custom-designed connection of the air cylinder to the carriage eliminates the effect of the air cylinder’s motion on the performance of the XMS100 stage. With the proper adjustment of pressure, a perfect balance of the load can be achieved. When motor power is turned off, the air cylinder’s valve will enable a controlled descent of the carriage. Also available with a more compact, but load-specific, magnetic counterweight.

Contact Inside Sales Support team to discuss application requirements and get a quote for the solution that best suits your needs.

Specifications

Technical Specs

Travel Range
100 mm
Minimum Incremental Motion
0.05 µm
Maximum Speed
300 mm/s
Centered Load Capacity
100 N
Accuracy, Guaranteed
± 0.75 µm
Bi-directional Repeatability, Guaranteed
± 0.05 µm
Limit Switches
Optical, fiducial on encoder
Origin
Optical, at center of travel, including mechanical zero signal

Compliance in Roll
2.0 µrad/Nm
Compliance in Yaw
3.5 µrad/Nm
Straightness, Flatness
± 0.75 µm
Cable Length
5 m
Weight
3.5 kg
MTBF
20,000 h
Compliance
RoHS 3, CE

Travel Range
100 mm
Minimum Incremental Motion
0.05 µm
Maximum Speed
300 mm/s
Centered Load Capacity
100 N
Accuracy, Guaranteed
± 0.75 µm
Bi-directional Repeatability, Guaranteed
± 0.05 µm
Limit Switches
Optical, fiducial on encoder
Origin
Optical, at center of travel, including mechanical zero signal

Compliance in Roll
2.0 µrad/Nm
Compliance in Yaw
3.5 µrad/Nm
Straightness, Flatness
± 0.75 µm
Cable Length
5 m
Weight
3.5 kg
MTBF
20,000 h
Compliance
RoHS 3, CE

Resources & Downloads

3D Product Models

2D Product Drawings

XMS100V Vertical Linear Stage(1.4 MB, PDF)
LMS Data Sheet(2.2 MB, PDF)
Mini Laser Machining Brochure 2016(1.4 MB, PDF)
Methods to Determine Optimized Scaling Acceleration(3.4 MB, PDF)
XMS100V Data Sheet(1.1 MB, PDF)
Surface Metrology.pdf(134.1 kB, PDF)
XMS100V-S(107.6 kB, PDF)
Cable Kits User's Manual.pdf(1.9 MB, PDF)
Laser Machining Brochure 2018(3.4 MB, PDF)

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Need help?

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