Wafer Positioning Stage, Integrated Vertical and Stepper Rotation Stage
Wafer Positioning Stage, Integrated Vertical and Stepper Rotation Stage
Model: ZVR-PP
Product Series Overview
ZVR Integrated Stepper Motor Vertical and Rotation StageNewport’s new ZVR-PP is an integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PP offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. The low mass and high natural frequency of the ZVR-PP, provides a platform for rapid step-and-settle applications. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PP offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for full specifications on the ZVR-PP.Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PP.
Resources & Downloads
3D Product Models
2D Product Drawings
ZVR-PP.pdf(576.3 kB, PDF) ZVR Data Sheet(1.6 MB, PDF) ZVR User's Manual.pdf(2.6 MB, PDF)
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- 0.25 µm MIM for Z-axis and 1.0 mdeg MIM for ϴ-axis when used with SMC100PP controller