These vacuum compatible, high-performance, stainless-steel translation stages are designed to move components smoothly and rigidly with the highest precision. Each of the 1.0 inch travel crossed-roller-bearing stages are clean assembled, use low vapor pressure grease, and provide <150 µrad angular deviation for single- or multi-axis travel.
- Vacuum compatible crossed roller bearing stages to 10-6 Torr
- Stages are clean assembled and use low vapor pressure grease
- Precision and smooth 1.0 in. translation with <150 µrad deviation
- Available without baseplate for minimal profile See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 9067-COM-V 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesLinear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, No Baseplate | |||||
![]() | 9067-COM-V-M 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesLinear Stage, 25.4 mm Travel, M4 and M6, Vacuum, No Baseplate | |||||
![]() | 9067-X-V 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesLinear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum | |||||
![]() | 9067-X-V-M 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesLinear Stage, 25.4 mm Travel, M4 and M6, Vacuum | |||||
![]() | 9067-XY-L-V 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesXY Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, Left-Handed | |||||
![]() | 9067-XY-R-V 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesXY Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum | |||||
![]() | 9067-XY-R-V-M 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesXY Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum | |||||
![]() | 9067-XYZ-L-V 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesXYZ Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, Left-Handed | |||||
![]() | 9067-XYZ-R-V 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesXYZ Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum | |||||
![]() | 9067-XZ-V 1.0 in. Travel Vacuum Compatible Crossed Roller Bearing Linear StagesXY Linear Stage, 1.0 in.Travel, 8-32 and 1/4-20, Vacuum | Discontinued | ||||
Features
Clean Assembled Using Low vapor Pressure Grease
Vacuum compatible crossed roller bearing stages are clean assembled and made with low vapor pressure grease appropriate for use in vacuum pressures as low as down to 10-6 Torr. 9066 and 9067 versions are also available without a baseplate for easier integration into the volume restrictions typical of vacuum systems.
Precision Control and Smooth Translation
These vacuum compatible, crossed-roller translation stages provide low profile, yet solid and sturdy linear translation. Like their standard versions, the weight load rests on the actuators of the stages to support load capacities up to 50 lb. in both horizontal and vertical orientations (including the X-configured stage), and can be locked in place. This also allows for the high load capacity of up to 50 lb. The micron-scale travel precision typically needed is achieved with an angular deviation of <150 µrad and straight-line accuracy better than 3 microns.



















